Invention Grant
- Patent Title: Phase change memory cell with a projection liner
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Application No.: US17114605Application Date: 2020-12-08
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Publication No.: US11476418B2Publication Date: 2022-10-18
- Inventor: Injo Ok , Ruqiang Bao , Andrew Herbert Simon , Kevin W. Brew , Nicole Saulnier , Iqbal Rashid Saraf , Prasad Bhosale
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agent L. Jeffrey Kelly
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
A semiconductor structure may include a heater surrounded by a second dielectric layer, a projection liner on top of the second dielectric layer, and a phase change material layer above the projection liner. A top surface of the projection liner may be substantially flush with a top surface of the heater. The projection liner may separate the phase change material layer from the second dielectric layer. The projection liner may provide a parallel conduction path in the crystalline phase and the amorphous phase of the phase change material layer. The semiconductor structure may include a bottom electrode below and in electrical contact with the heater and a top electrode above and in electrical contact with the phase change material layer.
Public/Granted literature
- US20220181547A1 PHASE CHANGE MEMORY CELL WITH A PROJECTION LINER Public/Granted day:2022-06-09
Information query
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