- 专利标题: Phase change memory cell with a projection liner
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申请号: US17114605申请日: 2020-12-08
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公开(公告)号: US11476418B2公开(公告)日: 2022-10-18
- 发明人: Injo Ok , Ruqiang Bao , Andrew Herbert Simon , Kevin W. Brew , Nicole Saulnier , Iqbal Rashid Saraf , Prasad Bhosale
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理商 L. Jeffrey Kelly
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
A semiconductor structure may include a heater surrounded by a second dielectric layer, a projection liner on top of the second dielectric layer, and a phase change material layer above the projection liner. A top surface of the projection liner may be substantially flush with a top surface of the heater. The projection liner may separate the phase change material layer from the second dielectric layer. The projection liner may provide a parallel conduction path in the crystalline phase and the amorphous phase of the phase change material layer. The semiconductor structure may include a bottom electrode below and in electrical contact with the heater and a top electrode above and in electrical contact with the phase change material layer.
公开/授权文献
- US20220181547A1 PHASE CHANGE MEMORY CELL WITH A PROJECTION LINER 公开/授权日:2022-06-09
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