A compact cleaning apparatus including a robot with a narrow range of motion is provided. The cleaning apparatus includes: a cleaning chamber; a cleaning station; a drying station; a separation wall; a single axis robot including a column arranged adjacent to a side surface, a linear guide extending vertically, and a vertical moving saddle movable vertically; an arm portion including a first rotation saddle rotatable about a second axis extending vertically, a first arm swingable about a third axis extending horizontally and extending orthogonal to the third axis, a second arm rotatable about a fourth axis orthogonal to the third axis, a second rotation saddle rotatable about a fifth axis orthogonal to the fourth axis, a third rotation saddle rotatable about a sixth axis orthogonal to the fifth axis; and a hand for gripping a workpiece.