Invention Grant
- Patent Title: Glass ceramic for ultraviolet lithography and method of manufacturing thereof
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Application No.: US16720251Application Date: 2019-12-19
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Publication No.: US11493841B2Publication Date: 2022-11-08
- Inventor: Ralf Hofmann , Majeed A. Foad , Cara Beasley
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Servilla Whitney LLC
- Main IPC: G03F1/22
- IPC: G03F1/22 ; C23C16/40 ; C23C16/34 ; C03C17/22 ; C03C10/00 ; C03C17/30 ; C03C17/245
Abstract:
An extreme ultraviolet mask and method of manufacture thereof includes: providing a glass-ceramic block; forming a glass-ceramic substrate from the glass-ceramic block; and depositing a planarization layer on the glass-ceramic substrate.
Information query
