Invention Grant
- Patent Title: Plasmonic photocathode emitters at ultraviolet and visible wavelengths
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Application No.: US16789650Application Date: 2020-02-13
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Publication No.: US11495428B2Publication Date: 2022-11-08
- Inventor: Katerina Ioakeimidi , Gildardo R. Delgado , Frances Hill , Gary V. Lopez Lopez , Miguel A. Gonzalez , Alan D. Brodie
- Applicant: KLA CORPORATION
- Applicant Address: US CA Milpitas
- Assignee: KLA CORPORATION
- Current Assignee: KLA CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Hodgson Russ LLP
- Main IPC: H01J1/34
- IPC: H01J1/34 ; H01J37/317 ; G02B5/00
Abstract:
A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.
Public/Granted literature
- US20200266019A1 PLASMONIC PHOTOCATHODE EMITTERS AT ULTRAVIOLET AND VISIBLE WAVELENGTHS Public/Granted day:2020-08-20
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