公开(公告)号：US20210048756A1

公开(公告)日：2021-02-18

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US11156926B2

公开(公告)日：2021-10-26

申请号：US16986751

申请日：2020-08-06

Applicant: KLA CORPORATION

Inventor： Zefram D. Marks ,  Gildardo R. Delgado ,  Rudy Garcia ,  Joseph Walsh ,  Matthew Hoffman

IPC: G03F7/20

Abstract: An actuator for an optic mount in a vacuum environment includes a bellows around an actuator compartment. The bellows provides a seal around the actuator. A filter assembly is positioned between the actuator compartment and an interior of a vacuum chamber. The filter assembly includes a first particle filter, a second particle filter, and a purifier medium between the first particle filter and the second particle filter. Vacuum conditions in the actuator compartment can be achieved with a pump for the vacuum chamber, but particles and contaminants from the actuator or actuator compartment are captured by the filter assembly.

公开(公告)号：US20210098223A1

公开(公告)日：2021-04-01

申请号：US17029501

申请日：2020-09-23

Applicant: KLA CORPORATION

Inventor： Sergei Belousov ,  Andrey Knizhnik ,  Inna M. Iskandarova ,  Boris Potapkin ,  Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel Gonzalez

IPC: H01J1/34 ,  G02B5/00

Abstract: A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.

公开(公告)号：US11217416B2

公开(公告)日：2022-01-04

申请号：US17029501

申请日：2020-09-23

Applicant: KLA CORPORATION

Inventor： Sergei Belousov ,  Andrey Knizhnik ,  Inna M. Iskandarova ,  Boris Potapkin ,  Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel Gonzalez

IPC: H01J1/34 ,  G02B5/00

Abstract: A photocathode emitter includes a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure array is configured to operate at a wavelength from 193 nm to 430 nm. The plasmonic structure array can be made of aluminum. An electron beam can be generated from a light beam directed at the plasmonic structure array of the photocathode emitter.

公开(公告)号：US11495428B2

公开(公告)日：2022-11-08

申请号：US16789650

申请日：2020-02-13

Applicant: KLA CORPORATION

Inventor： Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel A. Gonzalez ,  Alan D. Brodie

IPC: H01J1/34 ,  H01J37/317 ,  G02B5/00

Abstract: A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.

公开(公告)号：US20200266019A1

公开(公告)日：2020-08-20

申请号：US16789650

申请日：2020-02-13

Applicant: KLA CORPORATION

Inventor： Katerina Ioakeimidi ,  Gildardo R. Delgado ,  Frances Hill ,  Gary V. Lopez Lopez ,  Miguel A. Gonzalez ,  Alan D. Brodie

IPC: H01J1/34 ,  H01J37/317 ,  G02B5/00

Abstract: A photocathode emitter can include a transparent substrate, a photocathode layer, and a plasmonic structure array disposed between the transparent substrate and the photocathode layer. The plasmonic structure can serve as a spot-confining structure and an electrical underlayer for biasing the photocathode. The plasmonic structure can confine the incident light at subwavelength sizes.