Invention Grant
- Patent Title: Light pipe window structure for thermal chamber applications and processes
-
Application No.: US16553778Application Date: 2019-08-28
-
Publication No.: US11495479B2Publication Date: 2022-11-08
- Inventor: Joseph M. Ranish , Aaron Muir Hunter , Anzhong Chang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G02B6/08 ; G02B6/42 ; G02B6/00
Abstract:
A processing chamber is described. The processing chamber includes a chamber having an interior volume, a light pipe window structure coupled to the chamber, the light pipe window structure having a first transparent plate disposed within the interior volume of the chamber, and a radiant heat source coupled to a second transparent plate of the light pipe window structure in a position outside of the interior volume of the chamber, wherein the light pipe window structure includes a plurality of light pipe structures disposed between the first transparent plate and the second transparent plate.
Public/Granted literature
- US20190385872A1 LIGHT PIPE WINDOW STRUCTURE FOR THERMAL CHAMBER APPLICATIONS AND PROCESSES Public/Granted day:2019-12-19
Information query
IPC分类:
