Invention Grant
- Patent Title: Adhesion promoters
-
Application No.: US16188392Application Date: 2018-11-13
-
Publication No.: US11500290B2Publication Date: 2022-11-15
- Inventor: Dario Goldfarb , Bharat Kumar , Ekmini Anuja De Silva , Jing Guo
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Jon Gibbons
- Main IPC: G03F7/075
- IPC: G03F7/075 ; C08G77/00 ; C09J183/04 ; H01L21/027 ; H01L21/033 ; G03F7/16

Abstract:
An adhesion promoter composition comprising at least one of the following compounds:
(a) a cyclic compound having the formula: (b) a non-cyclic compound having the formula: wherein R1 and R2 each independently represents a non-photoactive phenyl, a photoactive phenyl or a C1-C4 alkyl; R3 represents a non-photoactive phenyl; R4 represents a photoactive phenyl; W represents Si or Ge; n represents an integer of value greater than 1; m represents an integer between 0 and 1.
(a) a cyclic compound having the formula: (b) a non-cyclic compound having the formula: wherein R1 and R2 each independently represents a non-photoactive phenyl, a photoactive phenyl or a C1-C4 alkyl; R3 represents a non-photoactive phenyl; R4 represents a photoactive phenyl; W represents Si or Ge; n represents an integer of value greater than 1; m represents an integer between 0 and 1.
Public/Granted literature
- US20200150532A1 SPIN ON ADHESION PROMOTERS Public/Granted day:2020-05-14
Information query
IPC分类: