公开(公告)号：US11205754B2

公开(公告)日：2021-12-21

申请号：US16264794

申请日：2019-02-01

Applicant: International Business Machines Corporation

Inventor： Ali Afzali-Ardakani ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  H01L51/05 ,  C01B32/158

Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.

公开(公告)号：US11199778B2

公开(公告)日：2021-12-14

申请号：US16299645

申请日：2019-03-12

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Jing Guo ,  Bharat Kumar ,  Ekmini A. De Silva ,  Jennifer Church ,  Dario Goldfarb ,  Nelson Felix

IPC: G03F7/20 ,  G03F7/32

Abstract: A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.

公开(公告)号：US10600965B2

公开(公告)日：2020-03-24

申请号：US15488762

申请日：2017-04-17

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Shu-Jen Han ,  Bharat Kumar ,  George S. Tulevski

IPC: C07C43/205 ,  C07C39/08 ,  H01L51/00 ,  C07F9/38 ,  C01B32/168 ,  H01L21/02 ,  C01B32/174 ,  C01B32/16

Abstract: Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.

公开(公告)号：US10367146B2

公开(公告)日：2019-07-30

申请号：US15799216

申请日：2017-10-31

Applicant: International Business Machines Corporation

Inventor： Ali Afzali-Ardakani ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  H01L51/05 ,  C01B32/158

Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.

公开(公告)号：US20180019402A1

公开(公告)日：2018-01-18

申请号：US15718657

申请日：2017-09-28

Applicant: International Business Machines Corporation

Inventor： Ali Afzali-Ardakani ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  H01L51/05

CPC classification number: H01L51/0048 ,  C01B32/158 ,  H01L51/0007 ,  H01L51/0012 ,  H01L51/0049 ,  H01L51/0558 ,  H01L2251/303

Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.

公开(公告)号：US11002730B2

公开(公告)日：2021-05-11

申请号：US15986960

申请日：2018-05-23

Applicant: International Business Machines Corporation

Inventor： Bharat Kumar ,  Sufi Zafar ,  Ali Afzali-Ardakani

IPC: B01J20/286 ,  G01N33/53 ,  G01N33/68 ,  G01N33/82 ,  G01N33/553 ,  G01N33/543 ,  C12N15/115 ,  G01N33/566

Abstract: The compositions described herein include a substrate, wherein the substrate is a metal, metal oxide, metal nitride or a silicon containing material; a self-assembled monolayer (SAM) bonded to the substrate, wherein the self-assembled monolayer comprises: a surface binding unit bonded to the substrate, wherein the surface binding unit is selected from the group consisting of hydroxamates, phosphonates, catechols, halosilanes, alkoxysilanes, phosphonic acids, alkenes, alkynes, alcohols, 1,2-diols, and thiols; a separator unit bonded to the surface binding unit; a mass altering unit bonded to the separator unit; and a detector unit bonded to the separator unit.

公开(公告)号：US10578577B2

公开(公告)日：2020-03-03

申请号：US15635447

申请日：2017-06-28

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Ali Afzali-Ardakani ,  Abram L. Falk ,  Bharat Kumar

IPC: G01N33/84 ,  G01N27/414 ,  H01L29/06 ,  H01L29/66 ,  G01N33/487

Abstract: Embodiments of the invention are directed to a solid-state zinc sensor. A non-limiting example of the sensor includes a semiconductor substrate. The sensor can also include an assembly surface on the semiconductor substrate. The sensor can also include a zinc detection monolayer chemically bound to the assembly surface. The sensor can also include a power supply electrically connected to the semiconductor substrate.

公开(公告)号：US20190288211A1

公开(公告)日：2019-09-19

申请号：US16425434

申请日：2019-05-29

Applicant: International Business Machines Corporation

Inventor： Ali Afzali-Ardakani ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  C01B32/158 ,  H01L51/05

Abstract: A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.

公开(公告)号：US10367145B2

公开(公告)日：2019-07-30

申请号：US15488751

申请日：2017-04-17

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Shu-Jen Han ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  C07F9/38 ,  H01L21/02 ,  C01B32/174 ,  C01B32/16 ,  C01B32/168

Abstract: Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.

公开(公告)号：US10043976B2

公开(公告)日：2018-08-07

申请号：US15488746

申请日：2017-04-17

Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventor： Shu-Jen Han ,  Bharat Kumar ,  George S. Tulevski

IPC: H01L51/00 ,  C07C259/06 ,  C07F9/38 ,  H01L21/02 ,  C01B31/02

Abstract: Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.