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公开(公告)号：US11205754B2
公开(公告)日：2021-12-21
申请号：US16264794
申请日：2019-02-01
IPC分类号： H01L51/00 , H01L51/05 , C01B32/158
摘要： A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US11199778B2
公开(公告)日：2021-12-14
申请号：US16299645
申请日：2019-03-12
发明人： Jing Guo , Bharat Kumar , Ekmini A. De Silva , Jennifer Church , Dario Goldfarb , Nelson Felix
摘要： A method of making an adhesion layer of an extreme ultraviolet (EUV) stack is presented. The method includes grafting an ultraviolet (UV) sensitive polymer brush on a hardmask, the polymer brush including a UV cleavable unit, depositing EUV resist over the polymer brush, exposing the EUV resist to remove the EUV resist in exposed areas by applying a developer, and flooding the exposed area with a UV light and a solvent developer to remove exposed portions of the polymer brush.
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公开(公告)号：US10600965B2
公开(公告)日：2020-03-24
申请号：US15488762
申请日：2017-04-17
发明人： Shu-Jen Han , Bharat Kumar , George S. Tulevski
IPC分类号： C07C43/205 , C07C39/08 , H01L51/00 , C07F9/38 , C01B32/168 , H01L21/02 , C01B32/174 , C01B32/16
摘要： Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.
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公开(公告)号：US10367146B2
公开(公告)日：2019-07-30
申请号：US15799216
申请日：2017-10-31
IPC分类号： H01L51/00 , H01L51/05 , C01B32/158
摘要： A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US20180019402A1
公开(公告)日：2018-01-18
申请号：US15718657
申请日：2017-09-28
CPC分类号： H01L51/0048 , C01B32/158 , H01L51/0007 , H01L51/0012 , H01L51/0049 , H01L51/0558 , H01L2251/303
摘要： A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US11002730B2
公开(公告)日：2021-05-11
申请号：US15986960
申请日：2018-05-23
发明人： Bharat Kumar , Sufi Zafar , Ali Afzali-Ardakani
IPC分类号： B01J20/286 , G01N33/53 , G01N33/68 , G01N33/82 , G01N33/553 , G01N33/543 , C12N15/115 , G01N33/566
摘要： The compositions described herein include a substrate, wherein the substrate is a metal, metal oxide, metal nitride or a silicon containing material; a self-assembled monolayer (SAM) bonded to the substrate, wherein the self-assembled monolayer comprises: a surface binding unit bonded to the substrate, wherein the surface binding unit is selected from the group consisting of hydroxamates, phosphonates, catechols, halosilanes, alkoxysilanes, phosphonic acids, alkenes, alkynes, alcohols, 1,2-diols, and thiols; a separator unit bonded to the surface binding unit; a mass altering unit bonded to the separator unit; and a detector unit bonded to the separator unit.
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公开(公告)号：US10578577B2
公开(公告)日：2020-03-03
申请号：US15635447
申请日：2017-06-28
发明人： Ali Afzali-Ardakani , Abram L. Falk , Bharat Kumar
IPC分类号： G01N33/84 , G01N27/414 , H01L29/06 , H01L29/66 , G01N33/487
摘要： Embodiments of the invention are directed to a solid-state zinc sensor. A non-limiting example of the sensor includes a semiconductor substrate. The sensor can also include an assembly surface on the semiconductor substrate. The sensor can also include a zinc detection monolayer chemically bound to the assembly surface. The sensor can also include a power supply electrically connected to the semiconductor substrate.
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公开(公告)号：US20190288211A1
公开(公告)日：2019-09-19
申请号：US16425434
申请日：2019-05-29
IPC分类号： H01L51/00 , C01B32/158 , H01L51/05
摘要： A method of fabricating a carbon nanotube based device, including forming a trench having a bottom surface and sidewalls on a substrate, selectively depositing a bi-functional compound having two reactive moieties in the trench, wherein a first of the two reactive moieties selectively binds to the bottom surface, converting a second of the two reactive moieties to a diazonium salt; and reacting the diazonium salt with a dispersion of carbon nanotubes to form a carbon nanotube layer bound to the bottom surface of the trench.
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公开(公告)号：US10367145B2
公开(公告)日：2019-07-30
申请号：US15488751
申请日：2017-04-17
发明人： Shu-Jen Han , Bharat Kumar , George S. Tulevski
IPC分类号： H01L51/00 , C07F9/38 , H01L21/02 , C01B32/174 , C01B32/16 , C01B32/168
摘要： Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.
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公开(公告)号：US10043976B2
公开(公告)日：2018-08-07
申请号：US15488746
申请日：2017-04-17
发明人： Shu-Jen Han , Bharat Kumar , George S. Tulevski
IPC分类号： H01L51/00 , C07C259/06 , C07F9/38 , H01L21/02 , C01B31/02
摘要： Structures and methods that include selective electrostatic placement based on a dipole-to-dipole interaction of electron-rich carbon nanotubes onto an electron-deficient pre-patterned surface. The structure includes a substrate with a first surface having a first isoelectric point and at least one additional surface having a second isoelectric point. A self-assembled monolayer is selectively formed on the first surface and includes an electron deficient compound including a deprotonated pendant hydroxamic acid or a pendant phosphonic acid group or a pendant catechol group bound to the first surface. An organic solvent can be used to deposit the electron rich carbon nanotubes on the self-assembled monolayer.
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