发明授权
- 专利标题: Display backplane, method of manufacturing the same and display device using the same
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申请号: US16835722申请日: 2020-03-31
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公开(公告)号: US11508786B2公开(公告)日: 2022-11-22
- 发明人: Jiayu He , Xue Liu , Zhengliang Li
- 申请人: BOE TECHNOLOGY GROUP CO., LTD.
- 申请人地址: CN Beijing
- 专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人: BOE TECHNOLOGY GROUP CO., LTD.
- 当前专利权人地址: CN Beijing
- 代理机构: Xsensus LLP
- 优先权: CN201911195069.3 20191128
- 主分类号: H01L27/32
- IPC分类号: H01L27/32 ; H01L31/105 ; H01L31/18 ; H01L27/12
摘要:
The disclosure provides a display backplane, a method of manufacturing the same, and a display device using the same. The display backplane includes a substrate; a thin film transistor structure layer disposed on one side of the substrate and including thin film transistors, a gate insulating layer, and an interlayer dielectric layer, where an etching rate of the interlayer dielectric layer carried out under an HF atmosphere condition is less than 2 Å/S; and photosensitive devices spaced apart from the thin film transistor structure layer and disposed on one side of the thin film transistor structure layer away from the substrate. The interlayer dielectric layer has a high compactness, and can effectively block H from entering the active layer of the thin film transistor to conductorize the active layer, thus guaranteeing good optical characteristics of the thin film transistor while carrying out optical compensation.
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