Invention Grant
- Patent Title: Display backplane, method of manufacturing the same and display device using the same
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Application No.: US16835722Application Date: 2020-03-31
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Publication No.: US11508786B2Publication Date: 2022-11-22
- Inventor: Jiayu He , Xue Liu , Zhengliang Li
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: Xsensus LLP
- Priority: CN201911195069.3 20191128
- Main IPC: H01L27/32
- IPC: H01L27/32 ; H01L31/105 ; H01L31/18 ; H01L27/12

Abstract:
The disclosure provides a display backplane, a method of manufacturing the same, and a display device using the same. The display backplane includes a substrate; a thin film transistor structure layer disposed on one side of the substrate and including thin film transistors, a gate insulating layer, and an interlayer dielectric layer, where an etching rate of the interlayer dielectric layer carried out under an HF atmosphere condition is less than 2 Å/S; and photosensitive devices spaced apart from the thin film transistor structure layer and disposed on one side of the thin film transistor structure layer away from the substrate. The interlayer dielectric layer has a high compactness, and can effectively block H from entering the active layer of the thin film transistor to conductorize the active layer, thus guaranteeing good optical characteristics of the thin film transistor while carrying out optical compensation.
Public/Granted literature
- US20210167143A1 DISPLAY BACKPLANE, METHOD OF MANUFACTURING THE SAME AND DISPLAY DEVICE USING THE SAME Public/Granted day:2021-06-03
Information query
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