Invention Grant
- Patent Title: Optical module
-
Application No.: US16492691Application Date: 2018-03-14
-
Publication No.: US11513339B2Publication Date: 2022-11-29
- Inventor: Tomofumi Suzuki , Tatsuya Sugimoto , Kyosuke Kotani
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JPJP2017-048561 20170314,JPJP2017-048566 20170314,JPJP2017-074492 20170404
- International Application: PCT/JP2018/009992 WO 20180314
- International Announcement: WO2018/168935 WO 20180920
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B27/14 ; B81B3/00 ; G01J3/45

Abstract:
An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region which is penetrated by the movable mirror, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. A portion of the movable mirror is positioned in the space.
Public/Granted literature
- US20200049975A1 OPTICAL MODULE Public/Granted day:2020-02-13
Information query