Invention Grant
- Patent Title: End effectors for moving workpieces and replaceable parts within a system for processing workpieces under vacuum
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Application No.: US15930924Application Date: 2020-05-13
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Publication No.: US11515127B2Publication Date: 2022-11-29
- Inventor: Martin L. Zucker , Peter J. Lembesis , Ryan M. Pakulski
- Applicant: Mattson Technology, Inc. , Beijing E-Town Semiconductor Technology Co., Ltd.
- Applicant Address: US CA Fremont; CN Beijing
- Assignee: Mattson Technology, Inc.,Beijing E-Town Semiconductor Technology Co., Ltd.
- Current Assignee: Mattson Technology, Inc.,Beijing E-Town Semiconductor Technology Co., Ltd.
- Current Assignee Address: US CA Fremont; CN Beijing
- Agency: Dority & Manning, P.A.
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/203 ; H01L21/677 ; H01L21/68 ; B25J11/00 ; B25J15/00 ; H01L21/67 ; H01L21/683 ; H01L21/687
Abstract:
An end effector for moving workpieces and replaceable parts within a system for processing workpieces. The end effector may include an arm portion extending between a first arm end and a second arm end along the axial direction. The end effector may further include a spatula portion extending between a first spatula end and a second spatula end, the first spatula end being adjacent the second arm end. Further, the end effector may include a first support member extending outwardly from the spatula portion, a second support member extending outwardly from the spatula portion, and a shared support member extending outwardly from the arm portion. The shared support member and the first support member together to support workpieces of a first diameter, and the shared support member and the second support member together support replaceable parts of a second diameter.
Information query
