Invention Grant
- Patent Title: Graded dimple height pattern on heater for lower backside damage and low chucking voltage
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Application No.: US16598665Application Date: 2019-10-10
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Publication No.: US11515191B2Publication Date: 2022-11-29
- Inventor: Vivek B. Shah , Bhaskar Kumar , Ganesh Balasubramanian
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H05B1/02 ; H01L21/67
Abstract:
Embodiments disclosed herein may include a heater pedestal. In an embodiment, the heater pedestal may comprise a heater pedestal body and a conductive mesh embedded in the heater pedestal. In an embodiment, the conductive mesh is electrically coupled to a voltage source In an embodiment, the heater pedestal may further comprise a support surface on the heater pedestal body. In an embodiment, the support surface comprises a plurality of pillars extending out from the heater pedestal body and arranged in concentric rings. In an embodiment pillars in an outermost concentric ring have a height that is greater than a height of pillars in an innermost concentric ring.
Information query
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