Invention Grant
- Patent Title: EMI reduction in piezoelectric micromachined ultrasound transducer array
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Application No.: US16281792Application Date: 2019-02-21
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Publication No.: US11515465B2Publication Date: 2022-11-29
- Inventor: Nikhil Apte , Chienliu Chang , Shreyas Thakar , Mei-Lin Chan
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven; Stefan D. Osterbur
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H01L41/09 ; B06B1/06 ; B81B7/00 ; G01N29/24 ; B81B3/00

Abstract:
A piezoelectric micromachined ultrasound transducer (PMUT) array may comprise PMUT devices with respective piezoelectric layers and electrode layers. Parasitic capacitance can be reduced when an electrode layer is not shared across PMUT devices but may expose the devices to electromagnetic interference (EMI). A conductive layer located within the structural layer or on a shared plane with the electrode layers may reduce EMI affecting the PMUT array operation.
Public/Granted literature
- US20190267536A1 EMI REDUCTION IN PIEZOELECTRIC MICROMACHINED ULTRASOUND TRANSDUCER ARRAY Public/Granted day:2019-08-29
Information query
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