- 专利标题: Nanoassembly methods for producing quasi-three-dimensional nanoarrays
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申请号: US17126316申请日: 2020-12-18
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公开(公告)号: US11518675B2公开(公告)日: 2022-12-06
- 发明人: Chi Hwan Lee , Zahyun Ku , Augustine Michael Urbas , Bongjoong Kim
- 申请人: Purdue Research Foundation
- 申请人地址: US IN West Lafayette
- 专利权人: Purdue Research Foundation
- 当前专利权人: Purdue Research Foundation
- 当前专利权人地址: US IN West Lafayette
- 代理机构: Hartman Global IP Law
- 代理商 Gary M. Hartman; Domenica N. S. Hartman
- 主分类号: B82B3/00
- IPC分类号: B82B3/00 ; B82Y40/00 ; G02B5/00 ; B82Y30/00
摘要:
Nanoassembly methods for producing quasi-3D plasmonic films with periodic nanoarrays of nano-sized surface features. A sacrificial layer is deposited on a surface of a donor substrate having periodic nanoarrays of nanopattern features formed thereon. A plasmon film is deposited onto the sacrificial layer and a dielectric spacer is deposited on the plasmon film. The donor substrate having the sacrificial layer, plasmon film, and dielectric spacer thereon is immersed in a bath of etchant to selectively remove the sacrificial layer such that the plasmon film and the dielectric spacer thereon adhere to the surface of the donor substrate. The dielectric spacer and the plasmon film are mechanically separated from the donor substrate to define a quasi-three dimensional (3D) plasmonic film having periodic nanoarrays of nano-sized surface features defined by the nanopattern features of the donor substrate surface. The quasi-3D plasmonic film is then applied to a receiver substrate.
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