Invention Grant
- Patent Title: Metal oxide semiconductor field-effect transistor (MOSFET) devices and manufacturing methods thereof
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Application No.: US17206832Application Date: 2021-03-19
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Publication No.: US11522064B2Publication Date: 2022-12-06
- Inventor: Sangjun Yun , Uihui Kwon , Seongnam Kim , Hyoshin Ahn
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2020-0051817 20200428,KR10-2020-0115517 20200909
- Main IPC: H01L29/49
- IPC: H01L29/49 ; H01L29/78 ; H01L29/66 ; H01L21/28

Abstract:
Provided are metal oxide field-effect transistor (MOSFET) devices having a metal gate structure, in which a work function of the metal gate structure is uniform along a length direction of a channel, and manufacturing methods thereof. The MOSFET devices include a semiconductor substrate, an active area on the semiconductor substrate and extending in a first direction, and a gate structure on the semiconductor substrate. The gate structure extends across the active area in a second direction that traverses the first direction and comprises a high-k layer, a first metal layer, a work function control (WFC) layer, and a second metal layer, which are sequentially stacked on the active area. A lower surface of the WFC layer may be longer than a first interface between a lower surface of the first metal layer and an upper surface of the high-k layer in the first direction.
Public/Granted literature
- US20210336026A1 METAL OXIDE SEMICONDUCTOR FIELD-EFFECT TRANSISTOR (MOSFET) DEVICES AND MANUFACTURING METHODS THEREOF Public/Granted day:2021-10-28
Information query
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