发明授权
- 专利标题: Electronic blackbody cavity and secondary electron detection device using the same
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申请号: US17225702申请日: 2021-04-08
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公开(公告)号: US11527335B2公开(公告)日: 2022-12-13
- 发明人: Ke Zhang , Guo Chen , Peng Liu , Kai-Li Jiang , Shou-Shan Fan
- 申请人: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- 申请人地址: CN Beijing; TW New Taipei
- 专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- 当前专利权人地址: CN Beijing; TW New Taipei
- 代理机构: ScienBiziP, P.C.
- 优先权: CN202011497833.5 20201217
- 主分类号: G21K1/10
- IPC分类号: G21K1/10
摘要:
A electronic blackbody cavity is provided. The electronic blackbody cavity comprises an inner surface; a chamber surrounded by the inner surface; an opening configured to make an electron beam enter the chamber; and a porous carbon material layer located on the inner surface. The porous carbon material layer consists of a plurality of carbon material particles and a plurality of micro gaps. The plurality of micro gaps are defined by the plurality of carbon material particles. A secondary electron detection device using the electronic blackbody cavity is also provided.
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