- Patent Title: Closure mechanism vacuum chamber isolation device and sub-system
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Application No.: US16651192Application Date: 2018-09-28
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Publication No.: US11530751B2Publication Date: 2022-12-20
- Inventor: Tuan Anh Nguyen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- International Application: PCT/US2018/053503 WO 20180928
- International Announcement: WO2019/067948 WO 20190404
- Main IPC: F16K3/06
- IPC: F16K3/06 ; F16K3/02 ; F16K31/04 ; F16K51/02 ; H01J37/32

Abstract:
The present disclosure generally relates to an isolation device for use in processing systems. The isolation device includes a body having a flow aperture formed therethrough. In one embodiment, the isolation device is disposed between a remote plasma source and a process chamber. A closure mechanism is pivotally disposed within the body. The closure mechanism can be actuated to enable or disable fluid communication between the remote plasma source and the process chamber. In one embodiment, the closure mechanism includes a shaft and a seal plate coupled to the shaft. A cross-arm is coupled to the shaft opposite the seal plate. The cross-arm is configured to selectively rotate the shaft and the seal plate of the closure mechanism.
Public/Granted literature
- US20200273677A1 CLOSURE MECHANISM VACUUM CHAMBER ISOLATION DEVICE AND SUB-SYSTEM Public/Granted day:2020-08-27
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