Invention Grant
- Patent Title: III-nitride surface-emitting laser and method of fabrication
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Application No.: US16652282Application Date: 2018-10-02
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Publication No.: US11532922B2Publication Date: 2022-12-20
- Inventor: Charles Forman , SeungGeun Lee , Erin C. Young , Jared Kearns , Steven P. DenBaars , James S. Speck , Shuji Nakamura
- Applicant: The Regents of the University of California
- Applicant Address: US CA Oakland
- Assignee: The Regents of the University of California
- Current Assignee: The Regents of the University of California
- Current Assignee Address: US CA Oakland
- Agency: Gates & Cooper LLP
- International Application: PCT/US2018/053982 WO 20181002
- International Announcement: WO2019/070719 WO 20190411
- Main IPC: H01S5/00
- IPC: H01S5/00 ; H01S5/183 ; H01S5/02 ; H01S5/024 ; H01S5/30 ; H01S5/343 ; H01S5/0234 ; H01S5/0237 ; H01S5/02355 ; H01S5/32 ; H01S5/10

Abstract:
A Vertical Cavity Surface Emitting Laser (VCSEL) including a light emitting III-nitride active region including quantum wells (QWs), wherein each of the quantum wells have a thickness of more than 8 nm, a cavity length of at least 7 λ, or at least 20 λ, where lambda is a peak wavelength of the light emitted from the active region, layers with reduced surface roughness, a tunnel junction intracavity contact. The VCSEL is flip chip bonded using In—Au bonding. This is the first report of a VCSEL capable of continuous wave operation.
Public/Granted literature
- US20200244036A1 III-NITRIDE SURFACE-EMITTING LASER AND METHOD OF FABRICATION Public/Granted day:2020-07-30
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