- Patent Title: Nanowire structures having non-discrete source and drain regions
-
Application No.: US16740089Application Date: 2020-01-10
-
Publication No.: US11552197B2Publication Date: 2023-01-10
- Inventor: Stephen M. Cea , Annalisa Cappellani , Martin D. Giles , Rafael Rios , Seiyon Kim , Kelin J. Kuhn
- Applicant: Google LLC
- Applicant Address: US CA Mountain View
- Assignee: Google LLC
- Current Assignee: Google LLC
- Current Assignee Address: US CA Mountain View
- Agency: Lerner, David, Littenberg, Krumholz & Mentlik, LLP
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L29/78 ; H01L29/41 ; H01L29/66 ; H01L29/08 ; H01L29/423 ; H01L29/06 ; H01L21/268 ; B82Y40/00

Abstract:
Nanowire structures having non-discrete source and drain regions are described. For example, a semiconductor device includes a plurality of vertically stacked nanowires disposed above a substrate. Each of the nanowires includes a discrete channel region disposed in the nanowire. A gate electrode stack surrounds the plurality of vertically stacked nanowires. A pair of non-discrete source and drain regions is disposed on either side of, and adjoining, the discrete channel regions of the plurality of vertically stacked nanowires.
Public/Granted literature
- US20200152797A1 NANOWIRE STRUCTURES HAVING NON-DISCRETE SOURCE AND DRAIN REGIONS Public/Granted day:2020-05-14
Information query
IPC分类: