Invention Grant
- Patent Title: Extreme ultraviolet light generation system and electronic device manufacturing method
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Application No.: US17468395Application Date: 2021-09-07
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Publication No.: US11553583B2Publication Date: 2023-01-10
- Inventor: Takayuki Yabu , Yoshifumi Ueno
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: JPJP2020-166727 20201001
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00 ; G21K1/06

Abstract:
An extreme ultraviolet light generation system may include a laser device configured to emit pulse laser light, an EUV light concentrating mirror configured to reflect and concentrate extreme ultraviolet light generated by irradiating a target with the pulse laser light, and a processor configured to receive a first energy parameter of the extreme ultraviolet light and control an irradiation frequency of the pulse laser light with which the target is irradiated so that change in a second energy parameter related to energy per unit time of the extreme ultraviolet light reflected by the EUV light concentrating mirror is suppressed.
Public/Granted literature
- US20220110205A1 EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM AND ELECTRONIC DEVICE MANUFACTURING METHOD Public/Granted day:2022-04-07
Information query
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