Invention Grant
- Patent Title: Membrane microfluidic valve with piezoelectric actuation and manufacturing process thereof
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Application No.: US16842474Application Date: 2020-04-07
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Publication No.: US11555554B2Publication Date: 2023-01-17
- Inventor: Enri Duqi , Lorenzo Baldo
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102019000005804 20190415
- Main IPC: F16K99/00
- IPC: F16K99/00 ; F16K31/00 ; B23P15/00 ; H01L41/09

Abstract:
A microfluidic valve formed in a body having a first and a second surface; an inlet channel extending in the body from the second surface; a first transverse channel extending in the body in a transverse direction with respect to the inlet channel; and an outlet channel extending in the body from the first surface. The inlet channel, the first transverse channel and the outlet channel form a fluidic path. The microfluidic valve further has an occluding portion, formed by the body and extending over the transverse channel; and a piezoelectric actuator coupled to the occluding portion and configured to move the occluding portion from an opening position of the valve, where the occluding portion does not interfere with the fluidic path, and a closing position of the valve, where the occluding portion interferes with and interrupts the fluidic path.
Public/Granted literature
- US20200326010A1 MEMBRANE MICROFLUIDIC VALVE WITH PIEZOELECTRIC ACTUATION AND MANUFACTURING PROCESS THEREOF Public/Granted day:2020-10-15
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