Invention Grant
- Patent Title: Photonic integrated circuit devices and methods of forming same
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Application No.: US17102978Application Date: 2020-11-24
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Publication No.: US11555959B2Publication Date: 2023-01-17
- Inventor: Keun Yeong Cho , Hyunil Byun , Ho-Chul Ji
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0124816 20181019
- Main IPC: G02B6/12
- IPC: G02B6/12 ; G01M11/00 ; G02F1/225 ; H01L27/144 ; H01L27/06 ; G02B6/13

Abstract:
A photonic integrated circuit device includes a semiconductor substrate (e.g., wafer) having a chip region therein, which is bounded on at least one side thereof by a scribe line. The chip region includes an optical transmitter, an optical receiver and a test optical waveguide. This test optical waveguide is coupled to the optical transmitter and the optical receiver and overlaps the scribe line. During a substrate dicing operation, a portion of the test optical waveguide overlapping the scribe line is removed.
Public/Granted literature
- US20210103094A1 PHOTONIC INTEGRATED CIRCUIT DEVICES AND METHODS OF FORMING SAME Public/Granted day:2021-04-08
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