Invention Grant
- Patent Title: Piezoelectric poling of a wafer with temporary and permanent electrodes
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Application No.: US16812752Application Date: 2020-03-09
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Publication No.: US11563166B2Publication Date: 2023-01-24
- Inventor: Chienliu Chang
- Applicant: INVENSENSE, INC.
- Applicant Address: US CA San Jose
- Assignee: INVENSENSE, INC.
- Current Assignee: INVENSENSE, INC.
- Current Assignee Address: US CA San Jose
- Agency: Haley Guiliano LLP
- Agent Joshua Van Hoven; Stefan D. Osterbur
- Main IPC: H01L41/257
- IPC: H01L41/257 ; B06B1/02 ; B06B1/06 ; H01L41/04 ; H01L41/047 ; H01L41/193 ; H01L41/29 ; H01L41/332 ; H01L41/08 ; G06V40/13

Abstract:
An array of piezoelectric micromachined ultrasound transducers (PMUTs) has a layer of piezoelectric material that requires poling during fabrication in order to properly align the piezoelectric dipoles to create a desired ultrasonic signal. The PMUT may have an interconnected set of lower electrodes that are fabricated between a processing layer of the PMUT and the piezoelectric layer. An upper electrode is fabricated overlaying the piezoelectric layer, and a poling voltage is applied between the upper electrode and the interconnected set of lower electrodes. After poling is complete, portions of the interconnected set of lower electrodes are removed to permanently isolate permanent lower electrodes from each other.
Public/Granted literature
- US20200287126A1 PIEZOELECTRIC POLING WITH TEMPORARY ELECTRODES Public/Granted day:2020-09-10
Information query
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