Invention Grant
- Patent Title: System and method for monitoring parameters of a semiconductor factory automation system
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Application No.: US15048676Application Date: 2016-02-19
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Publication No.: US11569138B2Publication Date: 2023-01-31
- Inventor: Mor Azarya , Michael D. Brain , Ami Appelbaum , Shai Mark , Arie Hoffman
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G05B19/418
- IPC: G05B19/418 ; H01L21/66 ; H01L21/67

Abstract:
A system for monitoring one or more conditions of an automation system of a semiconductor factory includes one or more instrumented substrates, one or more sealable containers and one or more system servers. The one or more instrumented substrates include one or more sensors. The one or more sensors measure one or more conditions of the one or more instrumented substrates as the one or more sealable containers transport the one or more instrumented substrates through the semiconductor factory. The one or more sealable containers also receive sensor data from the one or more sensors included on the one or more instrumented substrates. The one or more system servers are configured to receive the sensor data from the one or more sealable containers. The one or more servers are configured to identify one or more deviations in the measured one or more conditions.
Public/Granted literature
- US20160370797A1 System and Method for Monitoring Parameters of a Semiconductor Factory Automation System Public/Granted day:2016-12-22
Information query
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