Invention Grant
- Patent Title: Capped contact structure with variable adhesion layer thickness
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Application No.: US17162803Application Date: 2021-01-29
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Publication No.: US11569445B2Publication Date: 2023-01-31
- Inventor: Yu-Yu Lin , Feng-Min Lee
- Applicant: MACRONIX INTERNATIONAL CO., LTD.
- Applicant Address: TW Hsinchu
- Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee: MACRONIX INTERNATIONAL CO., LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Haynes Beffel & Wolfeld LLP
- Agent Andrew L. Dunlap
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
Metal oxide based memory devices and methods for manufacturing are described herein. A method for manufacturing a memory cell includes forming a bottom adhesion layer in a via formed in an insulating layer. Forming a bottom conductive plug in the bottom adhesion layer. Forming a top adhesion layer over the bottom adhesion layer and bottom conductive plug. Forming a top conductive plug in the top adhesion layer. Wherein the thickness of the bottom and top adhesion layers may be different from one another.
Public/Granted literature
- US20210151677A1 CAPPED CONTACT STRUCTURE WITH VARIABLE ADHESION LAYER THICKNESS Public/Granted day:2021-05-20
Information query
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