Invention Grant
- Patent Title: Protective metal oxy-fluoride coatings
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Application No.: US15498383Application Date: 2017-04-26
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Publication No.: US11572617B2Publication Date: 2023-02-07
- Inventor: David Fenwick , Chengtsin Lee , Jennifer Y. Sun , Yikai Chen
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: H01J37/34
- IPC: H01J37/34 ; H01J37/32 ; C23C14/06 ; C23C14/08 ; C23C14/00 ; C23C14/46 ; C23C16/44 ; C23C14/30
Abstract:
An article comprises a body having a protective coating. The protective coating is a thin film that comprises a metal oxy-fluoride. The metal oxy-fluoride has an empirical formula of MxOyFz, where M is a metal, y has a value of 0.1 to 1.9 times a value of x and z has a value of 0.1 to 3.9 times the value of x. The protective coating has a thickness of 1 to 30 microns and a porosity of less than 0.1%.
Public/Granted literature
- US20170323772A1 PROTECTIVE METAL OXY-FLUORIDE COATINGS Public/Granted day:2017-11-09
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