- 专利标题: Improper ferroelectric active and passive devices
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申请号: US16130903申请日: 2018-09-13
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公开(公告)号: US11581417B2公开(公告)日: 2023-02-14
- 发明人: Sasikanth Manipatruni , Uygar Avci , Sou-Chi Chang , Ian Young
- 申请人: Intel Corporation
- 申请人地址: US CA Santa Clara
- 专利权人: Intel Corporation
- 当前专利权人: Intel Corporation
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Essential Patents Group, LLP
- 主分类号: G11C11/22
- IPC分类号: G11C11/22 ; H01L29/51 ; H01L29/78 ; H01L27/11585 ; H01L27/11502
摘要:
A capacitor is provided which comprises: a first structure comprising metal; a second structure comprising metal; and a third structure between the first and second structures, wherein the third structure comprises an improper ferroelectric material. In some embodiments, a field effect transistor (FET) is provided which comprises: a substrate; a source and drain adjacent to the substrate; and a gate stack between the source and drain, wherein the gate stack includes: a dielectric; a first structure comprising improper ferroelectric material, wherein the first structure is adjacent to the dielectric; and a second structure comprising metal, wherein the second structure is adjacent to the first structure.
公开/授权文献
- US20200091308A1 IMPROPER FERROELECTRIC ACTIVE AND PASSIVE DEVICES 公开/授权日:2020-03-19
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