Invention Grant
- Patent Title: Substrate transport apparatus
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Application No.: US16197107Application Date: 2018-11-20
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Publication No.: US11587813B2Publication Date: 2023-02-21
- Inventor: Robert T. Caveney , Ulysses Gilchrist , Alexander Krupyshev
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/04 ; B25J11/00

Abstract:
A transfer apparatus including a frame, multiple arms connected to the frame, each arm having an end effector and an independent drive axis for extension and retraction of the respective arm with respect to other ones of the multiple arms, a linear rail defining a degree of freedom for the independent drive axis for extension and retraction of at least one arm, and a common drive axis shared by each arm and configured to pivot the multiple arms about a common pivot axis, wherein at least one of the multiple arms having another drive axis defining an independent degree of freedom with respect to other ones of the multiple arms.
Public/Granted literature
- US20230029442A9 SUBSTRATE TRANSPORT APPARATUS Public/Granted day:2023-01-26
Information query
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