Invention Grant
- Patent Title: Moisture seal for photonic devices
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Application No.: US16713709Application Date: 2019-12-13
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Publication No.: US11587888B2Publication Date: 2023-02-21
- Inventor: Asli Sahin , Thomas F. Houghton , Jennifer A. Oakley , Jeremy S. Alderman , Karen A. Nummy , Zhuojie Wu
- Applicant: GLOBALFOUNDRIES U.S. INC.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee: GLOBALFOUNDRIES U.S. INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Calderon, Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: G02B6/42
- IPC: G02B6/42 ; H01L23/00 ; G02B6/12

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to a moisture seal for photonic devices and methods of manufacture. The structure includes: a first trench in at least one substrate material; a guard ring structure with an opening and which at least partially surrounds the first trench; and a second trench at a dicing edge of the substrate, the second trench being lined on sidewalls with barrier material and spacer material over the barrier material.
Public/Granted literature
- US20210183791A1 MOISTURE SEAL FOR PHOTONIC DEVICES Public/Granted day:2021-06-17
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