Invention Grant
- Patent Title: Semiconductor device and method for manufacturing same
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Application No.: US17262882Application Date: 2019-07-26
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Publication No.: US11588049B2Publication Date: 2023-02-21
- Inventor: Huajun Jin
- Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Applicant Address: CN Jiangsu
- Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
- Current Assignee Address: CN Jiangsu
- Agency: Dority & Manning, P.A.
- Priority: CN201810840983.8 20180727
- International Application: PCT/CN2019/097836 WO 20190726
- International Announcement: WO2020/020328 WO 20200130
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/06 ; H01L29/40 ; H01L29/66

Abstract:
A semiconductor device and method for manufacturing same. The semiconductor device comprises: a drift region (120); an isolation structure (130) contacting the drift region (120), the isolation structure (130) comprising a first isolation layer (132), a hole etch stop layer (134) on the first isolation layer (132), and a second isolation layer (136) on the hole etch stop layer (134); and a hole field plate (180) provided above the hole etch stop layer (134) and contacting the hole etch stop layer (134).
Public/Granted literature
- US20210234041A1 Semiconductor Device and Method For Manufacturing Same Public/Granted day:2021-07-29
Information query
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