Invention Grant
- Patent Title: Photo diode with dual backside deep trench isolation depth
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Application No.: US17070543Application Date: 2020-10-14
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Publication No.: US11600644B2Publication Date: 2023-03-07
- Inventor: Yimin Huang
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Potashnik, LLC
- Main IPC: H01L27/146
- IPC: H01L27/146

Abstract:
In some embodiments, the present disclosure relates to an image sensor, including a first photodiode and a second photodiode disposed in a semiconductor substrate. A floating diffusion node is disposed along a frontside of the semiconductor substrate and between the first and second photodiodes. A partial backside deep trench isolation (BDTI) structure is disposed within the semiconductor substrate and between the first and second photodiodes. The partial BDTI extends from a backside of the semiconductor substrate and is spaced from the floating diffusion node. A full BDTI structure extends from the backside of the semiconductor substrate to the frontside of the semiconductor substrate.
Public/Granted literature
- US20210028208A1 PHOTO DIODE WITH DUAL BACKSIDE DEEP TRENCH ISOLATION DEPTH Public/Granted day:2021-01-28
Information query
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