- 专利标题: Semiconductor devices
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申请号: US17118888申请日: 2020-12-11
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公开(公告)号: US11600698B2公开(公告)日: 2023-03-07
- 发明人: Namkyu Edward Cho , Seung Soo Hong , Geum Jung Seong , Seung Hun Lee , Jeong Yun Lee
- 申请人: SAMSUNG ELECTRONICS CO., LTD.
- 申请人地址: KR Suwon-si
- 专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人: SAMSUNG ELECTRONICS CO., LTD.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Lee IP Law, P.C.
- 优先权: KR10-2018-0029753 20180314
- 主分类号: H01L29/06
- IPC分类号: H01L29/06 ; H01L29/08 ; H01L21/02 ; H01L27/02 ; H01L21/8238 ; H01L21/311 ; H01L21/306 ; H01L27/11 ; H01L29/165 ; H01L29/78 ; H01L27/092
摘要:
A semiconductor device includes fin patterns on a substrate, at least one gate electrode intersecting the fin patterns, source/drain regions on upper surfaces of the fin patterns, and at least one blocking layer on a sidewall of a first fin pattern of the fin patterns, the at least one blocking layer extending above an upper surface of the first fin pattern of the fin patterns, wherein a first source/drain region of the source/drain regions that is on the upper surface of the first fin pattern has an asymmetric shape and is in direct contact with the at least one blocking layer.
公开/授权文献
- US20210098577A1 SEMICONDUCTOR DEVICES 公开/授权日:2021-04-01
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