Invention Grant
- Patent Title: Forming semiconductor structures with two-dimensional materials
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Application No.: US17240482Application Date: 2021-04-26
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Publication No.: US11600720B2Publication Date: 2023-03-07
- Inventor: Chao-Ching Cheng , Hung-Li Chiang , Chun-Chieh Lu , Ming-Yang Li , Tzu-Chiang Chen
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Seed IP Law Group LLP
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/78 ; H01L29/04 ; H01L29/66 ; H01L29/20 ; H01L29/45

Abstract:
A process is provided to fabricate a finFET device having a semiconductor layer of a two-dimensional “2D” semiconductor material. The semiconductor layer of the 2D semiconductor material is a thin film layer formed over a dielectric fin-shaped structure. The 2D semiconductor layer extends over at least three surfaces of the dielectric fin structure, e.g., the upper surface and two sidewall surfaces. A vertical protrusion metal structure, referred to as “metal fin structure”, is formed about an edge of the dielectric fin structure and is used as a seed to grow the 2D semiconductor material.
Public/Granted literature
- US20210249527A1 FORMING SEMICONDUCTOR STRUCTURES WITH TWO-DIMENSIONAL MATERIALS Public/Granted day:2021-08-12
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