Invention Grant
- Patent Title: Piezoelectric actuator having a deformation sensor and fabrication method thereof
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Application No.: US17137220Application Date: 2020-12-29
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Publication No.: US11600765B2Publication Date: 2023-03-07
- Inventor: Domenico Giusti , Carlo Luigi Prelini , Marco Ferrera , Carla Maria Lazzari , Luca Seghizzi , Nicolo′ Boni , Roberto Carminati , Fabio Quaglia
- Applicant: STMICROELECTRONICS S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee: STMICROELECTRONICS S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102020000010264 20200507
- Main IPC: H01L41/09
- IPC: H01L41/09 ; B01L3/00 ; F16K99/00 ; G05D7/06 ; H01L41/22 ; H01L41/332 ; H01L41/08 ; B81B7/00
Abstract:
The MEMS actuator is formed by a substrate, which surrounds a cavity; by a deformable structure suspended on the cavity; by an actuation structure formed by a first piezoelectric region of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure formed by a second piezoelectric region of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
Public/Granted literature
- US20210351338A1 PIEZOELECTRIC ACTUATOR HAVING A DEFORMATION SENSOR AND FABRICATION METHOD THEREOF Public/Granted day:2021-11-11
Information query
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