Invention Grant
- Patent Title: MEMS device with optimized geometry for reducing the offset due to the radiometric effect
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Application No.: US16736485Application Date: 2020-01-07
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Publication No.: US11603310B2Publication Date: 2023-03-14
- Inventor: Francesco Rizzini , Alessandro Tocchio
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102019000000190 20190108
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01P15/02 ; G01P15/08 ; G01P15/125 ; G01C19/5712

Abstract:
A MEMS device with teeter-totter structure includes a mobile mass having an area in a plane and a thickness in a direction perpendicular to the plane. The mobile mass is tiltable about a rotation axis extending parallel to the plane and formed by a first and by a second half-masses arranged on opposite sides of the rotation axis. The first and the second masses have a first and a second centroid, respectively, arranged at a first and a second distance b1, b2, respectively, from the rotation axis. First through openings are formed in the first half-mass and, together with the first half-mass, have a first total perimeter p1 in the plane. Second through openings are formed in the second half-mass and, together with the second half-mass, have a second total perimeter p2 in the plane, where the first and the second perimeters p1, p2 satisfy the equation: p1×b1=p2×b2.
Public/Granted literature
- US20200216305A1 MEMS DEVICE WITH OPTIMIZED GEOMETRY FOR REDUCING THE OFFSET DUE TO THE RADIOMETRIC EFFECT Public/Granted day:2020-07-09
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