- 专利标题： Methods of protecting metallic components against corrosion using chromium-containing thin films
-
申请号： US17331473申请日： 2021-05-26
-
公开(公告)号： US11603767B2公开(公告)日： 2023-03-14
- 发明人: Thomas Knisley , Mark Saly , David Alexander Britz , David Thompson
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Patterson + Sheridan, LLP
- 主分类号： C23C16/06
- IPC分类号： C23C16/06 ; F01D5/28 ; C23C16/455 ; C23C16/34 ; C23C16/40 ; C23C16/30 ; C23C16/56 ; F01D9/02 ; F01D25/12 ; F01D25/28 ; F23R3/28 ; C07F11/00 ; F01D25/14
摘要：
Methods for depositing protective coatings on aerospace components are provided and include sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface of the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.
公开/授权文献
信息查询
IPC分类:
