公开(公告)号：US11519066B2

公开(公告)日：2022-12-06

申请号：US16921577

申请日：2020-07-06

申请人： Applied Materials, Inc.

发明人： David Alexander Britz ,  Lance A. Scudder ,  Yuriy Melnik ,  Sukti Chatterjee

IPC分类号： C23C16/34 ,  C23C16/455 ,  C23C28/04 ,  C23C16/40 ,  C23C16/50

摘要： Embodiments of the present disclosure generally relate to protective coatings on various substrates including aerospace components and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on an aerospace component includes forming an aluminum oxide layer on a surface of the aerospace component and depositing a boron nitride layer on or over the aluminum oxide layer during a vapor deposition process. In some examples, the method includes depositing a metal-containing catalytic layer on the aluminum oxide layer before depositing the boron nitride layer. The boron nitride layer can include hexagonal boron nitride (hBN).

公开(公告)号：US11028480B2

公开(公告)日：2021-06-08

申请号：US16356700

申请日：2019-03-18

申请人： Applied Materials, Inc.

发明人： Thomas Knisley ,  Mark Saly ,  David Alexander Britz ,  David Thompson

IPC分类号： C23C16/06 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D5/28 ,  F01D9/02 ,  F01D25/12 ,  F01D25/14 ,  F01D25/28 ,  F23R3/28 ,  C07F11/00

摘要： Methods for depositing protective coatings on aerospace components are provided and include sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.

公开(公告)号：US11009339B2

公开(公告)日：2021-05-18

申请号：US16268446

申请日：2019-02-05

申请人： Applied Materials, Inc.

发明人： Kamala Chakravarthy Raghavan ,  David Alexander Britz

IPC分类号： G01B11/06 ,  G06K7/14 ,  G01B11/25

摘要： Embodiments described herein relate to a non-destructive measurement device measurement device and a non-destructive measurement method for determining coating thickness of a three-dimensional (3D) object. In one embodiment, at least one first 3D image of an uncoated surface of the object and at least one second 3D image of a coated surface of the object are collected and analyzed to the determine the coating thickness of the object.

公开(公告)号：US11384648B2

公开(公告)日：2022-07-12

申请号：US16843358

申请日：2020-04-08

申请人： Applied Materials, Inc.

发明人： Yuriy Melnik ,  Sukti Chatterjee ,  Kaushal Gangakhedkar ,  Jonathan Frankel ,  Lance A. Scudder ,  Pravin K. Narwankar ,  David Alexander Britz ,  Thomas Knisley ,  Mark Saly ,  David Thompson

IPC分类号： F01D5/28 ,  F01D9/02 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28 ,  C07F11/00 ,  F01D25/14

摘要： Protective coatings on an aerospace component are provided. An aerospace component includes a surface containing nickel, nickel superalloy, aluminum, chromium, iron, titanium, hafnium, alloys thereof, or any combination thereof, and a coating disposed on the surface, where the coating contains a nanolaminate film stack having two or more pairs of a first deposited layer and a second deposited layer. The first deposited layer contains chromium oxide, chromium nitride, aluminum oxide, aluminum nitride, or any combination thereof, the second deposited layer contains aluminum oxide, aluminum nitride, silicon oxide, silicon nitride, silicon carbide, yttrium oxide, yttrium nitride, yttrium silicon nitride, hafnium oxide, hafnium nitride, hafnium silicide, hafnium silicate, titanium oxide, titanium nitride, titanium silicide, titanium silicate, or any combination thereof, and the first deposited layer and the second deposited layer have different compositions from each other.

公开(公告)号：US11603767B2

公开(公告)日：2023-03-14

申请号：US17331473

申请日：2021-05-26

申请人： Applied Materials, Inc.

发明人： Thomas Knisley ,  Mark Saly ,  David Alexander Britz ,  David Thompson

IPC分类号： C23C16/06 ,  F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28 ,  C07F11/00 ,  F01D25/14

摘要： Methods for depositing protective coatings on aerospace components are provided and include sequentially exposing the aerospace component to a chromium precursor and a reactant to form a chromium-containing layer on a surface of the aerospace component by an atomic layer deposition process. The chromium-containing layer contains metallic chromium, chromium oxide, chromium nitride, chromium carbide, chromium silicide, or any combination thereof.

公开(公告)号：US11739429B2

公开(公告)日：2023-08-29

申请号：US17339411

申请日：2021-06-04

申请人： Applied Materials, Inc.

发明人： Abhishek Mandal ,  Nitin Deepak ,  Neha Gupta ,  Prerna Sonthalia Goradia ,  Ankur Kadam ,  Kenichi Ohno ,  David Alexander Britz ,  Lance A. Scudder

IPC分类号： C23C16/40 ,  C23G1/10 ,  C23C16/02 ,  C23C16/34 ,  B64F5/40 ,  C11D7/32 ,  C11D7/06 ,  C11D7/08 ,  C11D11/00

CPC分类号： C23G1/10 ,  B64F5/40 ,  C11D7/06 ,  C11D7/08 ,  C11D7/3245 ,  C11D11/0023 ,  C23C16/0227 ,  C23C16/34 ,  C23C16/40

摘要： Methods for refurbishing aerospace components by removing corrosion and depositing protective coatings are provided herein. In one or more embodiments, a method of refurbishing an aerospace component includes exposing the aerospace component containing corrosion to an aqueous cleaning solution. The aerospace component contains a nickel superalloy, an aluminide layer disposed on the nickel superalloy, and an aluminum oxide layer disposed on the aluminide layer. The method includes removing the corrosion from a portion of the aluminum oxide layer with the aqueous cleaning solution to reveal the aluminum oxide layer, then exposing the aluminum oxide layer to a post-rinse, and forming a protective coating on the aluminum oxide layer.

公开(公告)号：US11560804B2

公开(公告)日：2023-01-24

申请号：US17832568

申请日：2022-06-03

申请人： Applied Materials, Inc.

发明人： Yuriy Melnik ,  Sukti Chatterjee ,  Kaushal Gangakhedkar ,  Jonathan Frankel ,  Lance A. Scudder ,  Pravin K. Narwankar ,  David Alexander Britz ,  Thomas Knisley ,  Mark Saly ,  David Thompson

IPC分类号： F01D5/28 ,  C23C16/455 ,  C23C16/34 ,  C23C16/40 ,  C23C16/30 ,  C23C16/56 ,  F01D9/02 ,  F01D25/12 ,  F01D25/28 ,  F23R3/28 ,  C07F11/00 ,  F01D25/14

摘要： Methods for forming protective coatings on aerospace components are provided. In one or more embodiments, the method includes exposing an aerospace component to a first precursor and a first reactant to form a first deposited layer on a surface of the aerospace component by a first deposition process (e.g., CVD or ALD), and exposing the aerospace component to a second precursor and a second reactant to form a second deposited layer on the first deposited layer by a second deposition process. The first deposited layer and the second deposited layer have different compositions from each other. The method also includes repeating the first deposition process and the second deposition process to form a nanolaminate film stack having from 2 pairs to about 1,000 pairs of the first deposited layer and the second deposited layer consecutively deposited on each other.

公开(公告)号：US11466364B2

公开(公告)日：2022-10-11

申请号：US16670555

申请日：2019-10-31

申请人： Applied Materials, Inc.

发明人： Kenichi Ohno ,  Eric H. Liu ,  Sukti Chatterjee ,  Yuriy Melnik ,  Thomas Knisley ,  David Alexander Britz ,  Lance A. Scudder ,  Pravin K. Narwankar

IPC分类号： C23C16/455 ,  C23C16/02 ,  C23C16/56 ,  C23C16/40

摘要： Embodiments of the present disclosure generally relate to protective coatings on substrates and methods for depositing the protective coatings. In one or more embodiments, a method of forming a protective coating on a substrate includes depositing a chromium oxide layer containing amorphous chromium oxide on a surface of the substrate during a first vapor deposition process and heating the substrate containing the chromium oxide layer comprising the amorphous chromium oxide to convert at least a portion of the amorphous chromium oxide to crystalline chromium oxide during a first annealing process. The method also includes depositing an aluminum oxide layer containing amorphous aluminum oxide on the chromium oxide layer during a second vapor deposition process and heating the substrate containing the aluminum oxide layer disposed on the chromium oxide layer to convert at least a portion of the amorphous aluminum oxide to crystalline aluminum oxide during a second annealing process.