Invention Grant
- Patent Title: Amorphous germanium waveguides for spectroscopic sensing and data communication applications
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Application No.: US17522819Application Date: 2021-11-09
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Publication No.: US11604147B2Publication Date: 2023-03-14
- Inventor: Eveline Postelnicu , Samarth Aggarwal , Kazumi Wada , Jurgen Michel , Lionel C. Kimerling , Michelle L. Clark , Anuradha M. Agarwal
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agency: Smith Baluch LLP
- Main IPC: G01N21/77
- IPC: G01N21/77 ; G02B6/125 ; H01L21/60 ; H01L21/02
Abstract:
A layer of amorphous Ge is formed on a substrate using electron-beam evaporation. The evaporation is performed at room temperature. The layer of amorphous Ge has a thickness of at least 50 nm and a purity of at least 90% Ge. The substrate is complementary metal-oxide-semiconductor (CMOS) compatible and is transparent at Long-Wave Infrared (LWIR) wavelengths. The layer of amorphous Ge can be used as a waveguide in chemical sensing and data communication applications. The amorphous Ge waveguide has a transmission loss in the LWIR of 11 dB/cm or less at 8 μm.
Public/Granted literature
- US20220065793A1 AMORPHOUS GERMANIUM WAVEGUIDES FOR SPECTROSCOPIC SENSING AND DATA COMMUNICATION APPLICATIONS Public/Granted day:2022-03-03
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