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1.发明授权公开(公告)号：US11604147B2
公开(公告)日：2023-03-14
申请号：US17522819
申请日：2021-11-09
Applicant: Massachusetts Institute of Technology
Inventor： Eveline Postelnicu , Samarth Aggarwal , Kazumi Wada , Jurgen Michel , Lionel C. Kimerling , Michelle L. Clark , Anuradha M. Agarwal
Abstract: A layer of amorphous Ge is formed on a substrate using electron-beam evaporation. The evaporation is performed at room temperature. The layer of amorphous Ge has a thickness of at least 50 nm and a purity of at least 90% Ge. The substrate is complementary metal-oxide-semiconductor (CMOS) compatible and is transparent at Long-Wave Infrared (LWIR) wavelengths. The layer of amorphous Ge can be used as a waveguide in chemical sensing and data communication applications. The amorphous Ge waveguide has a transmission loss in the LWIR of 11 dB/cm or less at 8 μm.
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2.发明授权公开(公告)号：US11204327B2
公开(公告)日：2021-12-21
申请号：US16691007
申请日：2019-11-21
Applicant: Massachusetts Institute of Technology
Inventor： Eveline Postelnicu , Samarth Aggarwal , Kazumi Wada , Jurgen Michel , Lionel C. Kimerling , Michelle L. Clark , Anuradha M. Agarwal
Abstract: A layer of amorphous Ge is formed on a substrate using electron-beam evaporation. The evaporation is performed at room temperature. The layer of amorphous Ge has a thickness of at least 50 nm and a purity of at least 90% Ge. The substrate is complementary metal-oxide-semiconductor (CMOS) compatible and is transparent at Long-Wave Infrared (LWIR) wavelengths. The layer of amorphous Ge can be used as a waveguide in chemical sensing and data communication applications. The amorphous Ge waveguide has a transmission loss in the LWIR of 11 dB/cm or less at 8 μm.
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公开(公告)号：US10852190B2
公开(公告)日：2020-12-01
申请号：US16506142
申请日：2019-07-09
Applicant: Massachusetts Institute of Technology
Inventor： Juejun Hu , Tian Gu , Hongtao Lin , Derek Kita , Anuradha M. Agarwal
Abstract: A spectrometer includes an interferometer having a first interference arm and a second interference arm to produce interference patterns from incident light. At least one of the interference arms includes a series of cascaded optical switches connected by two (or more) waveguides of different lengths. Each optical switch directs the incident light into one waveguide or another, thereby changing the optical path length difference between the first interference arm and the second interference arm. This approach can be extended to multi-mode incident light by placing parallel interferometers together, each of which performs spectroscopy of one single mode in the multi-mode incident light. To maintain the compactness of the spectrometer, adjacent interferometers can share one interference arm.
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公开(公告)号：US10006809B2
公开(公告)日：2018-06-26
申请号：US15429321
申请日：2017-02-10
Applicant: Massachusetts Institute of Technology
Inventor： Juejun Hu , Tian Gu , Hongtao Lin , Derek Matthew Kita , Anuradha M. Agarwal
CPC classification number: G01J3/4531 , G01J3/0218 , G02F1/313 , G02F1/3136 , G02F2001/311
Abstract: A spectrometer includes an interferometer having a first interference arm and a second interference arm to produce interference patterns from incident light. At least one of the interference arms includes a series of cascaded optical switches connected by two (or more) waveguides of different lengths. Each optical switch directs the incident light into one waveguide or another, thereby changing the optical path length difference between the first interference arm and the second interference arm. This approach can be extended to multi-mode incident light by placing parallel interferometers together, each of which performs spectroscopy of one single mode in the multi-mode incident light. To maintain the compactness of the spectrometer, adjacent interferometers can share one interference arm.
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公开(公告)号：US20130243383A1
公开(公告)日：2013-09-19
申请号：US13763090
申请日：2013-02-08
Inventor： Anuradha M. Agarwal , Antonio Canciamilla , Francesco Morichetti , Stefano Grillanda , Lionel C. Kimerling , Andrea Melloni , Jurgen Michel , Vivek Raghunathan , Vivek Singh
CPC classification number: G02B6/03694 , G02B6/02033 , G02B6/122
Abstract: In a photonic waveguide, there is provided an undercladding layer and a waveguide core, having a cross-sectional height and width, that is disposed on the undercladding layer. The waveguide core comprises a waveguide core material having a thermo-optic coefficient. A refractive index tuning cladding layer is disposed on top of the waveguide core. The refractive index tuning cladding layer comprises a refractive index tuning cladding material having an adjustable refractive index and an absorption length at a refractive index tuning radiation wavelength. A thermo-optic coefficient compensation cladding layer is disposed on top of the refractive index tuning cladding layer. The thermo-optic coefficient compensation cladding layer comprises a thermo-optic coefficient compensation material having a thermo-optic coefficient that is of opposite sign to the thermo-optic coefficient of the waveguide core material. The thermo-optic coefficient compensation cladding layer provides at least partial compensation for the waveguide core thermo-optic coefficient.
Abstract translation: 在光子波导中，提供了具有横截面高度和宽度的下封层和波导芯，其设置在下封层上。 波导芯包括具有热光系数的波导芯材料。 折射率调谐包层设置在波导芯的顶部。 折射率调谐包层包括在折射率调谐辐射波长处具有可调折射率和吸收长度的折射率调谐包层材料。 热电系数补偿包层设置在折射率调谐包层的顶部。 热光系数补偿包层包括具有与波导芯材料的热光系数相反的热光系数的热光系数补偿材料。 热光系数补偿包层对波导芯热光系数提供至少部分补偿。
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Patent Agency Ranking
公开(公告)号：US11378552B2
公开(公告)日：2022-07-05
申请号：US16893612
申请日：2020-06-05
Applicant: Massachusetts Institute of Technology
Inventor： Robin Singh , Anuradha M. Agarwal , Brian Anthony
Abstract: A microscale photoacoustic sensor uses the detection of ultrasound waves generated by a sample in response to incident light absorption to perform photoacoustic spectroscopy, imaging, and microscopy. The microscale photoacoustic sensor, including components to excite a sample and detect ultrasound waves, may be integrated onto a single chip. The microscale photoacoustic sensor may excite a sample using a metasurface collimator. The metasurface collimator includes an array of diffraction grooves to collimate an excitation beam uniformly out of the plane of the sensor to create a wide and homogeneous beam spot. The microscale photoacoustic sensor may detect ultrasound waves using an optical photoacoustic transducer. The optical photoacoustic transducer includes a resonator on a mechanical membrane to detect ultrasound waves with high sensitivity. The microscale photoacoustic sensor may be used in applications such as deep-tissue neural imaging or microfluidic biological screening.
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公开(公告)号：US11067754B2
公开(公告)日：2021-07-20
申请号：US16989448
申请日：2020-08-10
Applicant: Massachusetts Institute of Technology
Inventor： Lionel C. Kimerling , Jurgen Michel , Anuradha M. Agarwal , Kazumi Wada , Drew Michael Weninger , Samuel Serna
Abstract: Optical interconnects can offer higher bandwidth, lower power, lower cost, and higher latency than electrical interconnects alone. The optical interconnect system enables both optical and electrical interconnection, leverages existing fabrication processes to facilitate package-level integration, and delivers high alignment tolerance and low coupling losses. The optical interconnect system provides connections between a photonics integrated chip (PIC) and a chip carrier and between the chip carrier and external circuitry. The system provides a single flip chip interconnection between external circuitry and a chip carrier using a ball grid array (BGA) infrastructure. The system uses graded index (GRIN) lenses and cross-taper waveguide couplers to optically couple components, delivers coupling losses of less than 0.5 dB with an alignment tolerance of ±1 μm, and accommodates a 2.5× higher bandwidth density.
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公开(公告)号：US20180274981A1
公开(公告)日：2018-09-27
申请号：US15986098
申请日：2018-05-22
Applicant: Massachusetts Institute of Technology
Inventor： Juejun Hu , Tian Gu , Hongtao Lin , Derek Matthew Kita , Anuradha M. Agarwal
CPC classification number: G01J3/4531 , G01J3/0218 , G02F1/313 , G02F1/3136 , G02F2001/311
Abstract: A spectrometer includes an interferometer having a first interference arm and a second interference arm to produce interference patterns from incident light. At least one of the interference arms includes a series of cascaded optical switches connected by two (or more) waveguides of different lengths. Each optical switch directs the incident light into one waveguide or another, thereby changing the optical path length difference between the first interference arm and the second interference arm. This approach can be extended to multi-mode incident light by placing parallel interferometers together, each of which performs spectroscopy of one single mode in the multi-mode incident light. To maintain the compactness of the spectrometer, adjacent interferometers can share one interference arm.
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公开(公告)号：US11686659B2
公开(公告)日：2023-06-27
申请号：US17507563
申请日：2021-10-21
Applicant: Massachusetts Institute of Technology
Inventor： Robin Singh , Anuradha M. Agarwal , Danhao Ma , Peter X. Su , Brian W. Anthony
IPC: G01N15/02 , G01N21/552 , G01N33/543 , G01N21/39 , G01N15/06 , G01N21/77 , G01N21/45 , G02B6/12 , G01N15/00 , G02B6/293
CPC classification number: G01N15/0205 , G01N15/06 , G01N21/39 , G01N21/45 , G01N21/552 , G01N21/7703 , G01N21/7746 , G01N33/543 , G01N33/54373 , G02B6/12004 , G02B6/12007 , G01N2015/0046 , G01N2015/03 , G01N2015/0693 , G02B6/2938 , G02B6/29338
Abstract: A photonic aerosol particle sensor includes a microfluidic sensor chamber in which is disposed a plurality of photonic waveguide resonators each having a photonic waveguide on an underlying substrate, along a separate waveguide resonator path with a lateral width different than that of other photonic waveguide resonators. All waveguides in the plurality have a common vertical thickness of a common waveguide material having a refractive index that is larger than that of the underlying substrate material. An optical input connection couples light into the waveguide resonators. An aerosol particle input fluidically connected to the microfluidic chamber fluidically conveys aerosol particles to the chamber, and an aerosol particle output fluidically connected to the microfluidic chamber fluidically conveys aerosol particles out of the chamber. At least one optical output connection accepts light out of the plurality of photonic waveguide resonators to provide a signal indicative of at least one aerosol particle characteristic.
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公开(公告)号：US10386237B2
公开(公告)日：2019-08-20
申请号：US15986098
申请日：2018-05-22
Applicant: Massachusetts Institute of Technology
Inventor： Juejun Hu , Tian Gu , Hongtao Lin , Derek Matthew Kita , Anuradha M. Agarwal
Abstract: A spectrometer includes an interferometer having a first interference arm and a second interference arm to produce interference patterns from incident light. At least one of the interference arms includes a series of cascaded optical switches connected by two (or more) waveguides of different lengths. Each optical switch directs the incident light into one waveguide or another, thereby changing the optical path length difference between the first interference arm and the second interference arm. This approach can be extended to multi-mode incident light by placing parallel interferometers together, each of which performs spectroscopy of one single mode in the multi-mode incident light. To maintain the compactness of the spectrometer, adjacent interferometers can share one interference arm.
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