Invention Grant
- Patent Title: Hybrid integrated circuit package and method
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Application No.: US17121361Application Date: 2020-12-14
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Publication No.: US11605621B2Publication Date: 2023-03-14
- Inventor: Chen-Hua Yu , Jiun Yi Wu , Hsing-Kuo Hsia
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Slater Matsil, LLP
- Main IPC: H01L25/16
- IPC: H01L25/16 ; H01L23/00 ; H01L21/768 ; H01L23/522 ; H01L31/18 ; H01L31/02 ; H01L23/66

Abstract:
An embodiment device includes: a first dielectric layer; a first photonic die and a second photonic die disposed adjacent a first side of the first dielectric layer; a waveguide optically coupling the first photonic die to the second photonic die, the waveguide being disposed between the first dielectric layer and the first photonic die, and between the first dielectric layer and the second photonic die; a first integrated circuit die and a second integrated circuit die disposed adjacent the first side of the first dielectric layer; conductive features extending through the first dielectric layer and along a second side of the first dielectric layer, the conductive features electrically coupling the first photonic die to the first integrated circuit die, the conductive features electrically coupling the second photonic die to the second integrated circuit die; and a second dielectric layer disposed adjacent the second side of the first dielectric layer.
Public/Granted literature
- US20210134776A1 Hybrid Integrated Circuit Package and Method Public/Granted day:2021-05-06
Information query
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