Invention Grant
- Patent Title: Integrated assemblies having vertically-spaced channel material segments, and methods of forming integrated assemblies
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Application No.: US17315951Application Date: 2021-05-10
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Publication No.: US11605645B2Publication Date: 2023-03-14
- Inventor: John D. Hopkins , Shyam Surthi
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; G11C5/06 ; H01L27/11519 ; H01L27/1157 ; H01L27/11556 ; H01L27/11565 ; H01L27/11524

Abstract:
Some embodiments include a NAND memory array having a vertical stack of alternating insulative levels and wordline levels. The wordline levels have primary regions of a first vertical thickness, and have terminal projections of a second vertical thickness which is greater than the first vertical thickness. The terminal projections include control gate regions. Charge-blocking regions are adjacent the control gate regions, and are vertically spaced from one another. Charge-storage regions are adjacent the charge-blocking regions and are vertically spaced from one another. Gate-dielectric material is adjacent the charge-storage regions. Channel material is adjacent the gate dielectric material. Some embodiments included methods of forming integrated assemblies.
Public/Granted literature
Information query
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