Invention Grant
- Patent Title: Piezoelectric device
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Application No.: US16907400Application Date: 2020-06-22
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Publication No.: US11605775B2Publication Date: 2023-03-14
- Inventor: Yutaka Kishimoto , Shinsuke Ikeuchi , Masayuki Suzuki , Fumiya Kurokawa
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JPJP2019-151741 20190822
- Main IPC: H01L41/083
- IPC: H01L41/083 ; H01L41/047 ; H01L41/18

Abstract:
In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.
Public/Granted literature
- US20210057634A1 PIEZOELECTRIC DEVICE Public/Granted day:2021-02-25
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