公开(公告)号：US11706988B2

公开(公告)日：2023-07-18

申请号：US16777926

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa

IPC: H01L41/09 ,  H10N30/20 ,  H10N30/045 ,  H10N30/50 ,  H10N30/87 ,  H10N30/88 ,  H10N30/00

CPC classification number: H10N30/20 ,  H10N30/045 ,  H10N30/1051 ,  H10N30/50 ,  H10N30/871 ,  H10N30/883

Abstract: A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.

公开(公告)号：US11495728B2

公开(公告)日：2022-11-08

申请号：US16777925

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa ,  Yuzo Kishi

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09 ,  H01L41/297

Abstract: A piezoelectric device includes a piezoelectric body at least a portion of which can bend and vibrate, an upper electrode on an upper surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, a lower electrode on a lower surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, and a support substrate below the piezoelectric body, in which a recess extending from a lower surface of the support substrate toward the lower surface of the piezoelectric device is provided.

公开(公告)号：US20220241817A1

公开(公告)日：2022-08-04

申请号：US17724523

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Seiji Umezawa ,  Fumiya Kurokawa ,  Masayuki Suzuki

IPC: B06B1/06 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric device includes an outer base, a protruding base, and only one cantilevered portion. A protruding base includes a protrusion and a tip portion. The protrusion protrudes from an internal circumferential surface of the outer base toward a center of a ring shape. The tip portion is connected to the protrusion and located at the center. The cantilevered portion is connected to the tip portion, and extends while being spaced apart from the protrusion. The cantilevered portion includes a fixed end portion and a free periphery. The fixed end portion is connected to the tip portion. The free periphery is located along the internal circumferential surface. The protrusion is located between a first end and a second end of the free periphery.

公开(公告)号：US12185636B2

公开(公告)日：2024-12-31

申请号：US17506921

申请日：2021-10-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki Suzuki ,  Shinsuke Ikeuchi ,  Fumiya Kurokawa ,  Yutaka Kishimoto

IPC: H10N30/87 ,  H10N30/00

Abstract: A piezoelectric device includes a membrane portion including a single-crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is on a first surface. The lower electrode layer is on a second surface facing at least a portion of the upper electrode layer sandwiching the single-crystal piezoelectric layer. The single-crystal piezoelectric layer includes piezoelectric body cleavage directions extending along a boundary line between a cleavage plane occurring when the single-crystal piezoelectric layer is cleaved and the first surface. When viewed in a vertical direction, at least a portion of an upper electrode outer edge and at least a portion of a lower electrode outer edge are non-parallel to at least one of the piezoelectric body cleavage directions.

公开(公告)号：US12138658B2

公开(公告)日：2024-11-12

申请号：US17894217

申请日：2022-08-24

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya Kurokawa ,  Yasuhiro Aida ,  Shinsuke Ikeuchi ,  Seiji Umezawa ,  Masayuki Suzuki

IPC: B06B1/02 ,  G10K11/02

Abstract: An ultrasonic transducer includes first and second acoustic transducers and a housing with a bottomed tubular shape. The second acoustic transducer includes an annular section supporting a second membrane section and contacting an entire periphery of the second membrane section, and an acoustic matching plate facing the second membrane section and spaced apart from the second membrane section. The acoustic matching plate is connected to a surrounding wall portion defining a sealed space with the housing. An ultrasonic transmission path sandwiched between the first membrane section and the second membrane section is provided in the sealed space. A maximum inner width of the ultrasonic transmission path is smaller than a maximum inner width of the surrounding wall portion.

公开(公告)号：US11806750B2

公开(公告)日：2023-11-07

申请号：US17161726

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: H10N30/87 ,  H10N30/00 ,  H10N30/20 ,  B06B1/06

CPC classification number: B06B1/0603 ,  H10N30/1051 ,  H10N30/2047 ,  H10N30/871 ,  H10N30/877

Abstract: A MEMS device includes a piezoelectric layer made of a piezoelectric single crystal, a first electrode on a first surface of the piezoelectric layer, and a first layer covering the first surface of the piezoelectric layer. At least a portion of the piezoelectric layer is included in a membrane portion. The first electrode is covered with the first layer and includes a recess. The piezoelectric layer includes a through hole that passes through the piezoelectric layer between a surface of the piezoelectric layer, which is opposite to the first direction, and the recess at a position corresponding to at least a portion of the first electrode.

公开(公告)号：US11832522B2

公开(公告)日：2023-11-28

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya Kurokawa ,  Shinsuke Ikeuchi ,  Yoichi Mochida ,  Seiji Umezawa ,  Nobuyoshi Adachi ,  Yutaka Kishimoto

IPC: H10N30/20 ,  H10N30/88 ,  H10N30/30 ,  H10N30/853 ,  H10N30/04

CPC classification number: H10N30/2041 ,  H10N30/304 ,  H10N30/8542 ,  H10N30/88 ,  H10N30/04

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

公开(公告)号：US11784629B2

公开(公告)日：2023-10-10

申请号：US17161727

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H9/02031 ,  H03H9/02228 ,  H03H9/13 ,  H03H9/176 ,  H03H2003/023

Abstract: A piezoelectric device includes a membrane portion and a piezoelectric layer made of single crystal of a piezoelectric body. At least a portion of the piezoelectric layer is included in the membrane portion. An electrode is provided on a surface of the piezoelectric layer in the membrane portion. The piezoelectric layer includes a first polarization region in a first polarization state and a second polarization region in a second polarization state, and the first polarization region and the second polarization region are spaced apart from each other in a thickness direction or an in-plane direction.

公开(公告)号：US11605775B2

公开(公告)日：2023-03-14

申请号：US16907400

申请日：2020-06-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Masayuki Suzuki ,  Fumiya Kurokawa

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/18

Abstract: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

公开(公告)号：US11979713B2

公开(公告)日：2024-05-07

申请号：US17853979

申请日：2022-06-30

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Seiji Umezawa ,  Matti Liukku ,  Ville-Pekka Rytkönen ,  Anssi Blomqvist ,  Shinsuke Ikeuchi ,  Fumiya Kurokawa ,  Masayuki Suzuki

IPC: H04R17/02 ,  H10N30/853

CPC classification number: H04R17/02 ,  H10N30/8542

Abstract: A piezoelectric device includes a connecting section connecting a pair of beam sections adjacent to each other. The connecting section is connected to one of the pair of beam sections at a first end portion. The connecting section is connected to another of the pair of beam sections at a second end portion. The second end portion faces the first end portion in a direction in which the pair of beam sections are aligned. A second coupling portion is located along a first coupling portion. The connecting section includes only one first end portion. The connecting section includes only one second end portion. Each of the first end portion and the second end portion is closer to a tip end portion than to a fixed end portion of each of the pair of beam sections.