公开(公告)号：US11832522B2

公开(公告)日：2023-11-28

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya Kurokawa ,  Shinsuke Ikeuchi ,  Yoichi Mochida ,  Seiji Umezawa ,  Nobuyoshi Adachi ,  Yutaka Kishimoto

IPC: H10N30/20 ,  H10N30/88 ,  H10N30/30 ,  H10N30/853 ,  H10N30/04

CPC classification number: H10N30/2041 ,  H10N30/304 ,  H10N30/8542 ,  H10N30/88 ,  H10N30/04

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

公开(公告)号：US11784629B2

公开(公告)日：2023-10-10

申请号：US17161727

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H9/02031 ,  H03H9/02228 ,  H03H9/13 ,  H03H9/176 ,  H03H2003/023

Abstract: A piezoelectric device includes a membrane portion and a piezoelectric layer made of single crystal of a piezoelectric body. At least a portion of the piezoelectric layer is included in the membrane portion. An electrode is provided on a surface of the piezoelectric layer in the membrane portion. The piezoelectric layer includes a first polarization region in a first polarization state and a second polarization region in a second polarization state, and the first polarization region and the second polarization region are spaced apart from each other in a thickness direction or an in-plane direction.

公开(公告)号：US11605775B2

公开(公告)日：2023-03-14

申请号：US16907400

申请日：2020-06-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Masayuki Suzuki ,  Fumiya Kurokawa

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/18

Abstract: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

公开(公告)号：US11195984B2

公开(公告)日：2021-12-07

申请号：US16243171

申请日：2019-01-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/107 ,  H01L41/187 ,  H01L41/047 ,  H01L41/053 ,  H01L41/293 ,  H01L41/314 ,  H01L41/318 ,  H01L41/332

Abstract: A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

公开(公告)号：US12178132B2

公开(公告)日：2024-12-24

申请号：US17368907

申请日：2021-07-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi

IPC: H01L41/09 ,  H10N30/072 ,  H10N30/082 ,  H10N30/20 ,  H10N30/853 ,  H10N30/87

Abstract: In a piezoelectric device, a piezoelectric driving portion includes layers and is directly or indirectly supported by a base portion. The piezoelectric driving portion includes a piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is disposed on the upper side of the piezoelectric layer. The lower electrode layer faces at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. The piezoelectric driving portion includes a through groove extending through the piezoelectric driving portion in the vertical direction, so that a pair of inner side surfaces are provided. The pair of inner side surfaces each include a first small-width portion in which the width of the through groove decreases in a downward direction from an upper end surface of the piezoelectric layer.

公开(公告)号：US11495728B2

公开(公告)日：2022-11-08

申请号：US16777925

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa ,  Yuzo Kishi

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09 ,  H01L41/297

Abstract: A piezoelectric device includes a piezoelectric body at least a portion of which can bend and vibrate, an upper electrode on an upper surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, a lower electrode on a lower surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, and a support substrate below the piezoelectric body, in which a recess extending from a lower surface of the support substrate toward the lower surface of the piezoelectric device is provided.

公开(公告)号：US20220241817A1

公开(公告)日：2022-08-04

申请号：US17724523

申请日：2022-04-20

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Seiji Umezawa ,  Fumiya Kurokawa ,  Masayuki Suzuki

IPC: B06B1/06 ,  H01L41/053 ,  H01L41/113 ,  H01L41/187

Abstract: A piezoelectric device includes an outer base, a protruding base, and only one cantilevered portion. A protruding base includes a protrusion and a tip portion. The protrusion protrudes from an internal circumferential surface of the outer base toward a center of a ring shape. The tip portion is connected to the protrusion and located at the center. The cantilevered portion is connected to the tip portion, and extends while being spaced apart from the protrusion. The cantilevered portion includes a fixed end portion and a free periphery. The fixed end portion is connected to the tip portion. The free periphery is located along the internal circumferential surface. The protrusion is located between a first end and a second end of the free periphery.

公开(公告)号：US20190148619A1

公开(公告)日：2019-05-16

申请号：US16243171

申请日：2019-01-09

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Yoichi Mochida ,  Kansho Yamamoto ,  Takuo Hada ,  Hideya Horiuchi

IPC: H01L41/107 ,  H01L41/047 ,  H01L41/053

Abstract: A piezoelectric transformer that includes a base and an upper layer supported by the base. The upper layer includes a first piezoelectric layer that includes the portion of the upper layer that is interposed between an output electrode and an intermediate electrode, and a second piezoelectric layer that is superposed with the first piezoelectric layer and includes the portion of the upper layer interposed between the intermediate electrode and an input electrode in at least n vibration portions. Moreover, the input electrode includes multiple input electrode pieces and the output electrode includes multiple output electrode pieces. In addition, wiring lines are routed such that voltages of opposite phases can be respectively applied to a first input electrode piece group and a second input electrode piece group with the potential of the intermediate electrode serving as a reference.

公开(公告)号：US20160372654A1

公开(公告)日：2016-12-22

申请号：US15235353

申请日：2016-08-12

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Toshimaro Yoneda ,  Yoshitaka Matsuki ,  Naoyuki Endo

IPC: H01L41/187 ,  H01L41/08 ,  H01L41/047

CPC classification number: H01L41/1873 ,  C01G33/006 ,  C01P2002/72 ,  C01P2002/74 ,  C01P2006/40 ,  C23C14/088 ,  H01L41/047 ,  H01L41/0805 ,  H01L41/081 ,  H01L41/316

Abstract: A piezoelectric thin film contains potassium sodium niobate represented by general formula (K1-xNax)NbO3 and CaTiO3, wherein the lattice spacing calculated from the diffraction peak of the (001) plane in an X-ray diffraction profile of the piezoelectric thin film is 3.975 Å or less, and the ratio I101/I001 of the diffraction peak intensity I101 of the (101) plane to the diffraction peak intensity I001 of the (001) plane in the X-ray diffraction profile of the piezoelectric thin film 3 satisfies the relationship log10(I101/I001)≦−2.10.

Abstract translation: 压电薄膜含有由通式（K1-xNax）NbO3和CaTiO3表示的铌酸钾钠，其中由压电薄膜的X射线衍射图中（001）面衍射峰计算的晶格间距为3.975 （101）面的衍射峰强度I101的比I101 / I001与压电薄膜3的X射线衍射图中的（001）面的衍射峰强度I001的比值I101 / I001满足关系式 log10（I101 / I001）≦-2.10。

公开(公告)号：US12185636B2

公开(公告)日：2024-12-31

申请号：US17506921

申请日：2021-10-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Masayuki Suzuki ,  Shinsuke Ikeuchi ,  Fumiya Kurokawa ,  Yutaka Kishimoto

IPC: H10N30/87 ,  H10N30/00

Abstract: A piezoelectric device includes a membrane portion including a single-crystal piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is on a first surface. The lower electrode layer is on a second surface facing at least a portion of the upper electrode layer sandwiching the single-crystal piezoelectric layer. The single-crystal piezoelectric layer includes piezoelectric body cleavage directions extending along a boundary line between a cleavage plane occurring when the single-crystal piezoelectric layer is cleaved and the first surface. When viewed in a vertical direction, at least a portion of an upper electrode outer edge and at least a portion of a lower electrode outer edge are non-parallel to at least one of the piezoelectric body cleavage directions.