Invention Grant
- Patent Title: Combined corrugated piezoelectric microphone and corrugated piezoelectric vibration sensor
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Application No.: US16896665Application Date: 2020-06-09
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Publication No.: US11611835B2Publication Date: 2023-03-21
- Inventor: Christian Bretthauer , Pradyumna Mishra , Daniel Neumaier , David Tumpold
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Main IPC: G01P15/08
- IPC: G01P15/08 ; G01P15/09 ; H01L41/047 ; H01L41/113 ; G01P15/18 ; G01H11/08 ; G01P1/02 ; H04R17/02 ; B81B7/04 ; H04R1/28 ; H04R1/04 ; H04R7/18 ; H04R17/10

Abstract:
A MicroElectroMechanical Structure (MEMS) accelerometer includes a piezoelectric membrane including at least one electrode and an inertial mass, the piezoelectric membrane being affixed to a holder; and a circuit for evaluating sums and differences of signals associated with the at least one electrode to determine a three-dimensional acceleration direction, wherein the at least one electrode includes a segmented electrode, and wherein the segmented electrode includes four segmentation zones.
Public/Granted literature
- US20210382085A1 COMBINED CORRUGATED PIEZOELECTRIC MICROPHONE AND CORRUGATED PIEZOELECTRIC VIBRATION SENSOR Public/Granted day:2021-12-09
Information query
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