Invention Grant
- Patent Title: Lamb wave resonator-based torque sensor
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Application No.: US16509224Application Date: 2019-07-11
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Publication No.: US11621694B2Publication Date: 2023-04-04
- Inventor: Jeronimo Segovia Fernandez , Peter Smeys
- Applicant: TEXAS INSTRUMENTS INCORPORATED
- Applicant Address: US TX Dallas
- Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee: TEXAS INSTRUMENTS INCORPORATED
- Current Assignee Address: US TX Dallas
- Agent Valerie M. Davis; Frank D. Cimino
- Main IPC: H03H9/145
- IPC: H03H9/145 ; H03H9/02 ; H03H9/25 ; H01L41/053 ; G01L3/10

Abstract:
A torque sensor chip including a semiconductor substrate, an acoustic reflector formed on the semiconductor substrate, and first and second Lamb wave resonators (LWRs). The first LWR is formed on a side of the acoustic reflector opposite the semiconductor substrate. The first LWR is at a first angle with respect to an axis of the IC. The second LWR also is formed on the side of the acoustic reflector opposite the semiconductor substrate. The second LWR is at a second angle, different than the first angle, with respect to the axis of the IC.
Public/Granted literature
- US20200186120A1 LAMB WAVE RESONATOR-BASED TORQUE SENSOR Public/Granted day:2020-06-11
Information query
IPC分类: