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公开(公告)号：US20230061753A1
公开(公告)日：2023-03-02
申请号：US17463013
申请日：2021-08-31
Applicant: Texas Instruments Incorporated
Inventor： Bichoy Bahr , Jeronimo Segovia Fernandez , Hassan Omar Ali
Abstract: An example apparatus includes: a semiconductor substrate; a mechanical resonator supported by the substrate, the mechanical resonator including an array of capacitors; and a plasmonic infrared (IR) absorber including an array of metal structures. The mechanical resonator is between the substrate and the IR absorber.
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公开(公告)号：US11646714B2
公开(公告)日：2023-05-09
申请号：US16505669
申请日：2019-07-08
Applicant: Texas Instruments Incorporated
Inventor： Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
CPC classification number: H03H9/175 , H03H9/02275 , H03H9/0542 , H03H9/64 , H03H2009/02299 , H03H2009/155
Abstract: A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
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公开(公告)号：US11190164B2
公开(公告)日：2021-11-30
申请号：US16422494
申请日：2019-05-24
Applicant: Texas Instruments Incorporated
Inventor： Ting-Ta Yen , Jeronimo Segovia Fernandez , Bichoy Bahr , Peter Smeys
Abstract: A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.
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公开(公告)号：US20200021272A1
公开(公告)日：2020-01-16
申请号：US16505669
申请日：2019-07-08
Applicant: Texas Instruments Incorporated
Inventor： Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A laterally vibrating bulk acoustic wave (LVBAW) resonator includes a piezoelectric plate sandwiched between first and second metal layers. The second metal layer is patterned into an interdigital transducer (IDT) with comb-shaped electrodes having interlocking fingers. The width and pitch of the fingers of the electrodes determine the resonant frequency. A combined thickness of the first and second metal layers and the piezoelectric layer is less than the pitch of the interlocking fingers.
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公开(公告)号：US20250076190A1
公开(公告)日：2025-03-06
申请号：US18950734
申请日：2024-11-18
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Jeronimo Segovia Fernandez , Bichoy Bahr , Hassan Omar Ali , Benjamin Stassen Cook
IPC: G01N21/3504 , B81B3/00 , G01J5/08 , G01N21/27 , G01N21/61
Abstract: In some examples, an apparatus comprises a chopper, a first microelectromechanical system (MEMS) device, a second MEMS device, and a processing circuit. The chopper configured is to repeatedly switch states to enable and disable provision of a light signal. The first MEMS device is configured to provide first and second irradiance signals when the chopper is in, respectively, first and second states The second MEMS device is configured to provide first and second reference signals when the chopper is in, respectively, the first and second states. The processing circuit is configured to generate a first signal based on the first irradiance signal and the first reference signal, generate a second signal based on the second irradiance signal and the second reference signal, and provide a third signal at the processing output representing an irradiance measurement of the light source based on a difference between the first and second signals.
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Patent Agency Ranking
公开(公告)号：US11621694B2
公开(公告)日：2023-04-04
申请号：US16509224
申请日：2019-07-11
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Jeronimo Segovia Fernandez , Peter Smeys
IPC: H03H9/145 , H03H9/02 , H03H9/25 , H01L41/053 , G01L3/10
Abstract: A torque sensor chip including a semiconductor substrate, an acoustic reflector formed on the semiconductor substrate, and first and second Lamb wave resonators (LWRs). The first LWR is formed on a side of the acoustic reflector opposite the semiconductor substrate. The first LWR is at a first angle with respect to an axis of the IC. The second LWR also is formed on the side of the acoustic reflector opposite the semiconductor substrate. The second LWR is at a second angle, different than the first angle, with respect to the axis of the IC.
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公开(公告)号：US20210302308A1
公开(公告)日：2021-09-30
申请号：US17120339
申请日：2020-12-14
Applicant: TEXAS INSTRUMENTS INCORPORATED
Inventor： Jeronimo Segovia Fernandez , Bichoy Bahr , Hassan Omar Ali , Benjamin Stassen Cook
IPC: G01N21/3504 , G01N21/61 , G01N21/27 , G01J5/08 , B81B3/00
Abstract: A differential nondispersive infrared (NDIR) sensor incorporates an infrared (IR) chopper and multiple multi-bit digital registers to store and compare parameter ratio values, as may be digitally calibrated to corresponding temperature values, from chopper clock cycle portions in which a plasmonic MEMS detector is irradiated by the IR chopper with such values from chopper clock cycle portions in which the IR detector is not irradiated by the IR chopper. The plasmonic MEMS detector is referenced to a reference MEMS device via a parameter-ratio engine. The reference device can include a broadband IR reflector or can have a lower-absorption metasurface pattern giving it a lower quality factor than the plasmonic detector. The resultant enhancements to accuracy and precision of the NDIR sensor enable it to be used as a sub-parts-per-million gas concentration sensor or gas detector having laboratory, commercial, in-home, and battlefield applications.
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公开(公告)号：US20200186130A1
公开(公告)日：2020-06-11
申请号：US16446007
申请日：2019-06-19
Applicant: Texas Instruments Incorporated
Inventor： Jeronimo Segovia Fernandez , Peter Smeys , Ali Djabbari
Abstract: Methods, apparatus, systems and articles of manufacture are disclosed to measure a resonant sensor based on detection of group delay. An example apparatus includes a modulation manager configured to query the resonant sensor with a modulated signal including a frequency; and a resonance determiner configured to determine a resonance frequency of the resonant sensor based on a group delay associated with the resonant sensor and the frequency.
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公开(公告)号：US11264970B2
公开(公告)日：2022-03-01
申请号：US16290873
申请日：2019-03-02
Applicant: Texas Instruments Incorporated
Inventor： Jeronimo Segovia Fernandez , Peter Smeys , Ting-Ta Yen
Abstract: A MEMS resonator is operated at its parallel resonance frequency. An acoustic wave is propagated laterally away from a central region of the MEMS resonator through a piezoelectric layer of the MEMS resonator. The propagating acoustic wave is attenuated with concentric confiners that surround and are spaced apart from a perimeter of an electrode that forms the MEMS resonator.
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公开(公告)号：US20200373908A1
公开(公告)日：2020-11-26
申请号：US16422494
申请日：2019-05-24
Applicant: Texas Instruments Incorporated
Inventor： Ting-Ta Yen , Jeronimo Segovia Fernandez , Bichoy Bahr , Peter Smeys
Abstract: A micromechanical system (MEMS) resonator includes a base substrate. A piezoelectric layer has a first electrode attached to a first surface of the piezoelectric layer and a second electrode attached to a second surface of the piezoelectric layer opposite the first electrode. The first electrode is bounded by a perimeter edge. A patterned acoustic mirror is formed on a top surface of the first electrode opposite the piezoelectric layer, such that the patterned acoustic mirror covers a border strip of the top surface of the first electrode at the perimeter edge and does not cover an active portion of the top surface of the first electrode.
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