- 专利标题: Semiconductor memory device and method of fabricating the same
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申请号: US17137684申请日: 2020-12-30
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公开(公告)号: US11626411B2公开(公告)日: 2023-04-11
- 发明人: Jiyoung Kim , Daewon Kim , Dongjin Lee
- 申请人: Samsung Electronics Co., Ltd.
- 申请人地址: KR Suwon-si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si
- 代理机构: Muir Patent Law, PLLC
- 优先权: KR10-2018-0107365 20180907,KR10-2019-0013052 20190131
- 主分类号: H01L27/108
- IPC分类号: H01L27/108 ; G11C5/06 ; G11C11/408 ; G11C11/4091 ; G11C11/4097
摘要:
Disclosed are a semiconductor memory device and a method of fabricating the same. The device may include a first substrate comprising a cell array region, a first interlayer insulating layer covering the first substrate, a second substrate disposed on the first interlayer insulating layer, the second substrate including a core region electrically connected to the cell array region, a first adhesive insulating layer interposed between the first interlayer insulating layer and the second substrate, and contact plugs penetrating the second substrate, the first adhesive insulating layer, and the first interlayer insulating layer and electrically connecting the cell array region with the core region.
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