- 专利标题: Bottom electrode structure in memory device
-
申请号: US17233755申请日: 2021-04-19
-
公开(公告)号: US11631810B2公开(公告)日: 2023-04-18
- 发明人: Chao-Yang Chen , Chun-Yang Tsai , Kuo-Ching Huang , Wen-Ting Chu , Pili Huang , Cheng-Jun Wu
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Eschweiler & Potashnik, LLC
- 主分类号: H01L27/088
- IPC分类号: H01L27/088 ; H01L21/8236 ; H01L45/00 ; H01L27/24
摘要:
In some embodiments, the present disclosure relates to an integrated chip. The integrated chip includes one or more lower interconnects arranged within a dielectric structure over a substrate. A bottom electrode is disposed over one of the one or more lower interconnects. The bottom electrode includes a first material having a first electronegativity. A data storage layer separates the bottom electrode from a top electrode. The bottom electrode is between the data storage layer and the substrate. A reactivity reducing layer includes a second material and has a second electronegativity that is greater than or equal to the first electronegativity. The second material contacts a lower surface of the bottom electrode that faces the substrate.
公开/授权文献
- US20210242400A1 BOTTOM ELECTRODE STRUCTURE IN MEMORY DEVICE 公开/授权日:2021-08-05
信息查询
IPC分类: