- 专利标题: Diamond on nanopatterned substrate
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申请号: US17409916申请日: 2021-08-24
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公开(公告)号: US11634834B2公开(公告)日: 2023-04-25
- 发明人: Karl D. Hobart , Tatyana I. Feygelson , Marko J. Tadjer , Travis J. Anderson , Andrew D. Koehler , Samuel Graham, Jr. , Mark Goorsky , Zhe Cheng , Luke Yates , Tingyu Bai , Yekan Wang
- 申请人: The Government of the United States of America, as represented by the Secretary of the Navy
- 申请人地址: US VA Arlington
- 专利权人: The Government of the United States of America, as represented by the Secretary of the Navy
- 当前专利权人: The Government of the United States of America, as represented by the Secretary of the Navy
- 当前专利权人地址: US VA Arlington
- 代理机构: US Naval Research Laboratory
- 代理商 Joslyn J. Barritt
- 主分类号: C30B29/04
- IPC分类号: C30B29/04 ; C30B25/18
摘要:
A method for growing polycrystalline diamond films having engineered grain growth and microstructure. Grain growth of a polycrystalline diamond film on a substrate is manipulated by growing the diamond on a nanopatterned substrate having features on the order of the initial grain size of the diamond film. By growing the diamond on such nanopatterned substrates, the crystal texture of a polycrystalline diamond film can be engineered to favor the preferred orientation texture, which in turn enhances the thermal conductivity of the diamond film.
公开/授权文献
- US20210381127A1 Diamond on Nanopatterned Substrate 公开/授权日:2021-12-09
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